Inventor · disambiguated record
Michael G. R. Smith
Also filed as: SMITH MICHAEL G R
12 granted patents·2 pending applications·191 citations·filing 1999–2024
91Inventor score
Top patents by PatentIndex Score
14 records- 0192US6954993B1Concentric proximity processing headLAM RES CORP·Filed 2004·Granted Oct 18, 2005·64 cites·23 claims
- 0285US7383843B2Method and apparatus for processing wafer surfaces using thin, high velocity fluid layerLAM RES CORP·Filed 2004·Granted Jun 10, 2008·28 cites·17 claims
- 0384US6302966B1Temperature control system for plasma processing apparatusLAM RES CORP·Filed 1999·Granted Oct 16, 2001·42 cites·26 claims
- 0483US6518705B2Method and apparatus for producing uniform process ratesLAM RES CORP·Filed 2001·Granted Feb 11, 2003·16 cites·16 claims
- 0580US7389783B2Proximity meniscus manifoldLAM RES CORP·Filed 2004·Granted Jun 24, 2008·24 cites·10 claims
- 0675US2025121465A1Substrate processing aparatuses with rotating mechanisms including shafts with gas flow pathsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0769US6995067B2Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiencyLAM RES CORP·Filed 2003·Granted Feb 7, 2006·10 cites·10 claims
- 0863US7534307B2Methods for processing wafer surfaces using thin, high velocity fluid layerLAM RES CORP·Filed 2008·Granted May 19, 2009·1 cites·14 claims
- 0963US7406972B2Substrate proximity processing structuresLAM RES CORP·Filed 2007·Granted Aug 5, 2008·1 cites·15 claims
- 1060US12186851B2Use of vacuum during transfer of substratesLAM RES CORP·Filed 2020·Granted Jan 7, 2025·0 cites·23 claims
- 1156US7293571B2Substrate proximity processing housing and insert for generating a fluid meniscusLAM RES CORP·Filed 2004·Granted Nov 13, 2007·4 cites·10 claims
- 1250US7909934B2Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiencyLAM RES CORP·Filed 2005·Granted Mar 22, 2011·0 cites·11 claims
- 1343US2003145952A1Method and apparatus for producing uniform process ratesLAM RES CORP·Filed 2002·Application pending·0 cites
- 1440US8236382B2Proximity substrate preparation sequence, and method, apparatus, and system for implementing the sameRAVKIN MICHAEL·Filed 2004·Granted Aug 7, 2012·1 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →