Inventor · disambiguated record
Michael Marinus Anna Steur
Also filed as: STEUR MICHAEL MARINUS ANNA
3 granted patents·1 pending application·2 citations·filing 2020–2023
53Inventor score
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0184US11880144B2Object table, a stage apparatus and a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Jan 23, 2024·2 cites·20 claims
- 0273US2024142885A1Object table, a stage apparatus and a lithographic apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0365US12474645B2Object table, stage apparatus, holding method and lithographic apparatusASML NETHERLANDS BV·Filed 2021·Granted Nov 18, 2025·0 cites·20 claims
- 0454US12315756B2Method of manufacturing a substrate support for a lithographic apparatus, substrate table, lithographic apparatus, device manufacturing method, method of useASML NETHERLANDS BV·Filed 2020·Granted May 27, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →