Inventor · disambiguated record
Michiro Sugitani
Also filed as: SUGITANI MICHIRO
15 granted patents·298 citations·filing 1997–2011
94Inventor score
Files withSUMITOMO EATON NOVA7SEN CORP AN SHI AND AXCELIS CO3AXCELIS TECH INC2EATON CORP1FUSE GENSHU1
Top patents by PatentIndex Score
15 records- 0191US6573517B1Ion implantation apparatusSUMITOMO EATON NOVA·Filed 2000·Granted Jun 3, 2003·46 cites·14 claims
- 0287US6242747B1Method and system for optimizing linac operational parametersAXCELIS TECH INC·Filed 1999·Granted Jun 5, 2001·55 cites·20 claims
- 0385US6794661B2Ion implantation apparatus capable of increasing beam currentSUMITOMO EATON NOVA·Filed 2002·Granted Sep 21, 2004·37 cites·40 claims
- 0482US5760409ADose control for use in an ion implanterEATON CORP·Filed 1997·Granted Jun 2, 1998·45 cites·8 claims
- 0580US7315034B2Irradiation system with ion beam/charged particle beamSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Jan 1, 2008·7 cites·18 claims
- 0679US7304319B2Wafer charge compensation device and ion implantation system having the sameSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Dec 4, 2007·7 cites·18 claims
- 0778US6984833B2Ion implanter and method for controlling the sameSUMITOMO EATON NOVA·Filed 2004·Granted Jan 10, 2006·14 cites·24 claims
- 0877US6797968B2Ion beam processing method and apparatus thereforSUMITOMO EATON NOVA·Filed 2002·Granted Sep 28, 2004·15 cites·72 claims
- 0976US6194734B1Method and system for operating a variable aperture in an ion implanterAXCELIS TECH INC·Filed 1999·Granted Feb 27, 2001·32 cites·19 claims
- 1071US9023720B2Manufacturing method of semiconductor deviceFUSE GENSHU·Filed 2011·Granted May 5, 2015·4 cites·16 claims
- 1171US7187143B2Mover device and semiconductor manufacturing apparatus and methodSUMITOMO EATON NOVA·Filed 2004·Granted Mar 6, 2007·16 cites·48 claims
- 1270US6815697B2Ion beam charge neutralizer and method thereforSUMITOMO EATON NOVA·Filed 2003·Granted Nov 9, 2004·8 cites·23 claims
- 1369US6635889B2Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereofSUMITOMO EATON NOVA·Filed 2002·Granted Oct 21, 2003·7 cites·20 claims
- 1467US7597531B2Method of controlling mover deviceSEN CORP AN SHI AND AXCELIS CO·Filed 2005·Granted Oct 6, 2009·3 cites·9 claims
- 1562US8163635B2Manufacturing method of semiconductor deviceSUGITANI MICHIRO·Filed 2010·Granted Apr 24, 2012·2 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →