Inventor · disambiguated record
Michael Sweeney
Also filed as: SWEENEY MICHAEL · Sweeney Michael Patrick
4 granted patents·87 citations·filing 1997–2015
74Inventor score
Top patents by PatentIndex Score
4 records- 0190US7446868B1Micro defects in semi-conductorsNANOMETRICS INC·Filed 2006·Granted Nov 4, 2008·29 cites·20 claims
- 0278US7113276B1Micro defects in semi-conductorsASTI OPERATING COMPANY INC·Filed 1997·Granted Sep 26, 2006·58 cites·20 claims
- 0332US7713404B2Monitoring apparatus and method for improving the accuracy and repeatability of electrochemical capacitance voltage (ECV) measurementsNANOMETRICS INC·Filed 2003·Granted May 11, 2010·0 cites·7 claims
- 0430US9849562B2And manufacture of an abrasive polishing toolSHINE-FILE LLC·Filed 2015·Granted Dec 26, 2017·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →