Inventor · disambiguated record
Mitsuo Tabata
Also filed as: TABATA MITSUO
19 granted patents·1 pending application·580 citations·filing 1980–2003
96Inventor score
Top patents by PatentIndex Score
20 records- 0194US4811062AMethod for aligning first and second objects relative to each other and apparatus for practicing this methodTOSHIBA KK·Filed 1988·Granted Mar 7, 1989·82 cites·23 claims
- 0290US6084716AOptical substrate inspection apparatusTOSHIBA KK·Filed 1998·Granted Jul 4, 2000·89 cites·21 claims
- 0380US5744381AMethod of inspecting a pattern formed on a sample for a defect, and an apparatus thereofTOSHIBA KK·Filed 1996·Granted Apr 28, 1998·60 cites·9 claims
- 0480US4572956AElectron beam pattern transfer system having an autofocusing mechanismTOKYO SHIBAURA ELECTRIC CO·Filed 1983·Granted Feb 25, 1986·21 cites·18 claims
- 0579US4545068AImage processing systemTOKYO SHIBAURA ELECTRIC CO·Filed 1983·Granted Oct 1, 1985·63 cites·13 claims
- 0675US7068364B2Pattern inspection apparatusTOSHIBA KK·Filed 2003·Granted Jun 27, 2006·13 cites·6 claims
- 0773US5960106ASample inspection apparatus and sample inspection methodTOSHIBA KK·Filed 1995·Granted Sep 28, 1999·57 cites·28 claims
- 0872US5995219APattern defect inspection apparatusTOSHIBA KK·Filed 1998·Granted Nov 30, 1999·39 cites·12 claims
- 0971US4326202AImage memory deviceAGENCY IND SCIENCE TECHN·Filed 1980·Granted Apr 20, 1982·21 cites·1 claims
- 1069US5404410AMethod and system for generating a bit patternTOSHIBA KK·Filed 1994·Granted Apr 4, 1995·38 cites·5 claims
- 1162US6909501B2Pattern inspection apparatus and pattern inspection methodTOSHIBA KK·Filed 2001·Granted Jun 21, 2005·10 cites·10 claims
- 1256US4698513APosition detector by vibrating a light beam for averaging the reflected lightTOKYO SHIBAURA ELECTRIC CO·Filed 1987·Granted Oct 6, 1987·14 cites·19 claims
- 1354US4642468APosition detecting method for detecting the relative positions of the first and second membersTOSHIBA KK·Filed 1984·Granted Feb 10, 1987·9 cites·20 claims
- 1454US4590382AMethod of aligning two members utilizing marks provided thereonTOSHIBA KK·Filed 1984·Granted May 20, 1986·18 cites·6 claims
- 1550US5828457ASample inspection apparatus and sample inspection methodTOSHIBA KK·Filed 1997·Granted Oct 27, 1998·14 cites·28 claims
- 1646US5602645APattern evaluation apparatus and a method of pattern evaluationTOSHIBA KK·Filed 1995·Granted Feb 11, 1997·12 cites·13 claims
- 1745US4808002AMethod and device for aligning first and second objects relative to each otherTOSHIBA KK·Filed 1988·Granted Feb 28, 1989·7 cites·19 claims
- 1840US5812259AMethod and apparatus for inspecting slight defects in a photomask patternTOPCON CORP·Filed 1996·Granted Sep 22, 1998·7 cites·7 claims
- 1939US6100970AApparatus for inspecting slight defects on a photomask patternTOPCON CORP·Filed 1998·Granted Aug 8, 2000·6 cites·8 claims
- 2038US2004114824A1Method of adjusting the level of a specimen surfaceFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →