Inventor · disambiguated record
Mohammad Awad
Also filed as: AWAD MOHAMMAD
5 granted patents·2 pending applications·2 citations·filing 2018–2024
62Inventor score
Top patents by PatentIndex Score
7 records- 0177US11472044B2Binary passive variable stiffness jointUNIV KHALIFA SCIENCE & TECHNOLOGY·Filed 2018·Granted Oct 18, 2022·2 cites·18 claims
- 0260US12276916B2Drive device, optical system and lithography apparatusZEISS CARL SMT GMBH·Filed 2022·Granted Apr 15, 2025·0 cites·20 claims
- 0355US2025068078A1Optical system, lithography apparatus having an optical system, and method for producing an optical systemZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0452US2023228798A1Method and device for measuring actuators in a projection exposure apparatus for semiconductor lithographyZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0551US12276917B2Mirror, in particular for microlithographyZEISS CARL SMT GMBH·Filed 2022·Granted Apr 15, 2025·0 cites·19 claims
- 0651US11901948B2Modulation device, control device, optical system, lithography system and methodZEISS CARL SMT GMBH·Filed 2022·Granted Feb 13, 2024·0 cites·21 claims
- 0744US10649343B2Method and device for modifying imaging properties of an optical system for microlithographyZEISS CARL SMT GMBH·Filed 2019·Granted May 12, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →