Inventor · disambiguated record
Morihiro Takanashi
Also filed as: TAKANASHI MORIHIRO
4 granted patents·5 pending applications·66 citations·filing 2008–2020
72Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0196US8349085B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Jan 8, 2013·59 cites·7 claims
- 0273US8003920B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2008·Granted Aug 23, 2011·5 cites·7 claims
- 0363US8465593B2Substrate processing apparatus and gas supply methodHAYASHI DAISUKE·Filed 2008·Granted Jun 18, 2013·2 cites·6 claims
- 0446US2009188428A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0546US2010043894A1Valve element, particle entry preventive mechanism, exhaust control apparatus, and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0643US2015132960A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
- 0743US2010206846A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
- 0840US2014060572A1Plasma processing apparatus and cleaning method for removing metal oxide filmTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0938US11309199B2Substrate transfer apparatus and substrate transfer methodTOKYO ELECTRON LTD·Filed 2020·Granted Apr 19, 2022·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →