Inventor · disambiguated record
Mohan Thilagaraj
Also filed as: THILAGARAJ MOHAN
3 granted patents·2 pending applications·10 citations·filing 2015–2022
62Inventor score
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0189US10373794B2Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamberLAM RES CORP·Filed 2015·Granted Aug 6, 2019·9 cites·19 claims
- 0273US11189452B2Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamberLAM RES CORP·Filed 2019·Granted Nov 30, 2021·1 cites·17 claims
- 0369US12283451B2Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamberLAM RES CORP·Filed 2021·Granted Apr 22, 2025·0 cites·20 claims
- 0450US2024203763A1Use of signal filtering schemes in high tcr based controlLAM RES CORP·Filed 2022·Application pending·0 cites
- 0545US2023052543A1Decoupling radiofrequency (rf) signals from input signal conductors of a process chamberLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →