Inventor · disambiguated record
Monica Thukkaram
Also filed as: THUKKARAM MONICA
1 granted patent·2 pending applications·0 citations·filing 2022–2023
5Inventor score
Files withASM IP HOLDING BV3
Top patents by PatentIndex Score
3 records- 0154US2023091094A1Method of forming a photoresist absorber layer and structure including sameASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0254US2023077088A1Method of forming an underlayer for extreme ultraviolet (euv) dose reduction and structure including sameASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0351US12428723B2Method of forming a layer comprising magnesium, aluminum, and zinc, and related solids and systemsASM IP HOLDING BV·Filed 2023·Granted Sep 30, 2025·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →