Inventor · disambiguated record
Motoi Yamagata
Also filed as: YAMAGATA MOTOI
5 granted patents·5 pending applications·4 citations·filing 2019–2025
65Inventor score
Files withTOKYO ELECTRON LTD10
Top patents by PatentIndex Score
10 records- 0194US11532784B2Substrate processing apparatus and methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 20, 2022·3 cites·18 claims
- 0270US11417504B2Stage device and processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 16, 2022·1 cites·19 claims
- 0360US2025174441A1Substrate Processing ApparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0460US2023249306A1Method and apparatus for processing substrateTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0556US2024209509A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0655US12167542B2Method for manufacturing substrate with sensorTOKYO ELECTRON LTD·Filed 2021·Granted Dec 10, 2024·0 cites·9 claims
- 0753US12315707B2Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted May 27, 2025·0 cites·15 claims
- 0853US2025122625A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0947US2025232963A1Substrate Processing ApparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1044US12392026B2Method and device for substrate processingTOKYO ELECTRON LTD·Filed 2020·Granted Aug 19, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →