Inventor · disambiguated record
Naohide Ito
Also filed as: ITO NAOHIDE
7 granted patents·2 pending applications·2 citations·filing 2013–2023
70Inventor score
Files withTOKYO ELECTRON LTD9
Top patents by PatentIndex Score
9 records- 0161US12344936B2Liquid raw material supplying method and gas supply apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Jul 1, 2025·0 cites·10 claims
- 0261US9583318B2Plasma processing apparatus, plasma processing method, and recording mediumTOKYO ELECTRON LTD·Filed 2016·Granted Feb 28, 2017·1 cites·7 claims
- 0360US10186422B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Jan 22, 2019·1 cites·5 claims
- 0456US11073851B2Monitoring apparatus of raw material tank and monitoring method of raw material tankTOKYO ELECTRON LTD·Filed 2019·Granted Jul 27, 2021·0 cites·16 claims
- 0546US11621185B2Semiconductor manufacturing apparatus and method for transferring waferTOKYO ELECTRON LTD·Filed 2021·Granted Apr 4, 2023·0 cites·11 claims
- 0646US2022372624A1Control apparatus and control method for film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0739US2014345523A1Substrate ejection detection device, method of detecting substrate ejection and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0837US10002417B2Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jun 19, 2018·0 cites·15 claims
- 0932US9828675B2Processing apparatus and processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Nov 28, 2017·0 cites·13 claims
Join the waitlist — get patent alerts
Get an alert when Naohide Ito files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →