Inventor · disambiguated record
Naoto Kihara
Also filed as: KIHARA NAOTO
8 granted patents·1 pending application·216 citations·filing 1983–2007
88Inventor score
Top patents by PatentIndex Score
9 records- 0198US6593152B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2001·Granted Jul 15, 2003·109 cites·60 claims
- 0290US7247848B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2003·Granted Jul 24, 2007·28 cites·16 claims
- 0384US6765217B1Charged-particle-beam mapping projection-optical systems and methods for adjusting sameNIKON CORP·Filed 1999·Granted Jul 20, 2004·37 cites·31 claims
- 0478US7745784B2Electron beam apparatus and method of manufacturing semiconductor device using the apparatusEBARA CORP·Filed 2007·Granted Jun 29, 2010·4 cites·8 claims
- 0573US6717145B1Mapping electron microscopes exhibiting improved imaging of specimen having chargeable bodiesNIKON CORP·Filed 2000·Granted Apr 6, 2004·11 cites·17 claims
- 0671US4448404ADevice for holding a sheet-like sampleNIPPON KOGAKU KK·Filed 1983·Granted May 15, 1984·25 cites·7 claims
- 0757US7064339B2Charged-particle-beam mapping projection-optical systems and methods for adjusting sameNIKON CORP·Filed 2004·Granted Jun 20, 2006·2 cites·38 claims
- 0856US7183562B2Charged-particle-beam mapping projection-optical systems and methods for adjusting sameNIKON CORP·Filed 2006·Granted Feb 27, 2007·0 cites·4 claims
- 0948US2004227077A1Electron microscopes exhibiting improved imaging of specimen having chargeable bodiesNIKON CORP·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →