Inventor · disambiguated record
Naoko Kitagawa
Also filed as: KITAGAWA NAOKO
4 granted patents·2 citations·filing 2018–2022
58Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0174US10480069B2Storage device, vaporizer and substrate processing apparatusHITACHI INT ELECTRIC INC·Filed 2018·Granted Nov 19, 2019·2 cites·13 claims
- 0268US11728159B2Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Granted Aug 15, 2023·0 cites·26 claims
- 0358US11257669B2Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Feb 22, 2022·0 cites·22 claims
- 0445US11515152B2Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrateKOKUSAI ELECTRIC CORP·Filed 2020·Granted Nov 29, 2022·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →