Inventor · disambiguated record
Nathan Musselwhite
Also filed as: MUSSELWHITE Nathan
6 granted patents·4 pending applications·10 citations·filing 2016–2024
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0185US11488831B2Efficient cleaning and etching of high aspect ratio structuresLAM RES CORP·Filed 2019·Granted Nov 1, 2022·3 cites·16 claims
- 0282US11062897B2Metal doped carbon based hard mask removal in semiconductor fabricationLAM RES CORP·Filed 2017·Granted Jul 13, 2021·4 cites·26 claims
- 0381US10446416B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2016·Granted Oct 15, 2019·3 cites·19 claims
- 0477US12040193B2Efficient cleaning and etching of high aspect ratio structuresLAM RES CORP·Filed 2022·Granted Jul 16, 2024·0 cites·16 claims
- 0576US2024363355A1Efficient cleaning and etching of high aspect ratio structuresLAM RES CORP·Filed 2024·Application pending·0 cites
- 0671US2024387258A1Film stack simplification for high aspect ratio patterning and vertical scalingLAM RES CORP·Filed 2024·Application pending·0 cites
- 0754US12080592B2Film stack simplification for high aspect ratio patterning and vertical scalingLAM RES CORP·Filed 2019·Granted Sep 3, 2024·0 cites·8 claims
- 0850US12467147B2Vapor cleaning of substrate surfacesLAM RES CORP·Filed 2020·Granted Nov 11, 2025·0 cites·12 claims
- 0947US2025183051A1Selective precision etching of semiconductor materialsLAM RES CORP·Filed 2023·Application pending·0 cites
- 1045US2023207328A1Selective precision etching of semiconductor materialsLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →