Inventor · disambiguated record
Naoyuki Nozawa
Also filed as: NOZAWA NAOYUKI
10 granted patents·3 pending applications·88 citations·filing 1998–2017
87Inventor score
Top patents by PatentIndex Score
13 records- 0178US5976255ASubstrate holder for reducing non-uniform film characteristics resulting from support structuresANELVA CORP·Filed 1998·Granted Nov 2, 1999·44 cites·10 claims
- 0277US9346171B2Substrate transport apparatus, and system and method for manufacturing electronic deviceCANON ANELVA CORPOREATION·Filed 2013·Granted May 24, 2016·6 cites·8 claims
- 0377US7770714B2Transfer apparatusCANON ANELVA CORP·Filed 2008·Granted Aug 10, 2010·6 cites·16 claims
- 0475US6660089B2Substrate support mechanism and substrate rotation deviceANELVA CORP·Filed 2001·Granted Dec 9, 2003·12 cites·8 claims
- 0574US10738380B2Deposition apparatusCANON ANELVA CORP·Filed 2017·Granted Aug 11, 2020·2 cites·17 claims
- 0654US2009308317A1Carrier with deposition shieldCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 0750US6202592B1Substrate holderANELVA CORP·Filed 1999·Granted Mar 20, 2001·11 cites·5 claims
- 0847US9896760B2Deposition apparatusCANON ANELVA CORP·Filed 2015·Granted Feb 20, 2018·0 cites·5 claims
- 0941US6030455ASubstrate holderANELVA CORP·Filed 1998·Granted Feb 29, 2000·7 cites·19 claims
- 1033US2011315346A1Cooling apparatus and heating apparatusNISHIMURA HIDEKAZU·Filed 2011·Application pending·0 cites
- 1132US8534975B2Substrate transport apparatus and method for manufacturing magnetic recording mediumHAGIWARA ITARU·Filed 2009·Granted Sep 17, 2013·0 cites·2 claims
- 1228US8912697B2Vacuum actuator including a stator forming a part of a vacuum partition wallWATANABE KAZUHITO·Filed 2010·Granted Dec 16, 2014·0 cites·12 claims
- 1328US2012014770A1Substrate conveyance apparatus, electronic device manufacturing system, and electronic device manufacturing methodWATANABE KAZUHITO·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →