Inventor · disambiguated record
Naotaka Toyama
Also filed as: TOYAMA NAOTAKA
4 granted patents·42 citations·filing 1999–2008
74Inventor score
Top patents by PatentIndex Score
4 records- 0176US6422922B1Workpiece holder for polishing, apparatus for polishing workpiece and method for polishing workpieceSHINETSU HANDOTAI KK·Filed 2000·Granted Jul 23, 2002·18 cites·6 claims
- 0258US6558233B1Wafer polishing method, wafer cleaning method and wafer protective filmSHINETSU HANDOTAI KK·Filed 2000·Granted May 6, 2003·7 cites·13 claims
- 0352US6386957B1Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatusSHINETSU HANDOTAI KK·Filed 1999·Granted May 14, 2002·17 cites·12 claims
- 0438US8287331B2Method for manufacturing polishing pad, and method for polishing waferKANAYA KOICHI·Filed 2008·Granted Oct 16, 2012·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →