Inventor · disambiguated record
Naoyuki Umehara
Also filed as: UMEHARA NAOYUKI
6 granted patents·3 pending applications·28 citations·filing 2004–2019
79Inventor score
Top patents by PatentIndex Score
9 records- 0186US10264662B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Apr 16, 2019·8 cites·6 claims
- 0280US9640368B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted May 2, 2017·11 cites·16 claims
- 0378US9736921B2Method for impedance matching of plasma processing apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Aug 15, 2017·3 cites·7 claims
- 0469US10615005B2Plasma generating methodTOKYO ELECTRON LTD·Filed 2019·Granted Apr 7, 2020·1 cites·6 claims
- 0567US8038833B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Oct 18, 2011·2 cites·5 claims
- 0651US7008275B2Electrical joint forming member and plasma processing apparatusNEOMAX MATERIALS CO LTD·Filed 2004·Granted Mar 7, 2006·3 cites·5 claims
- 0745US2012009829A1Electrical joint member for reducing an electrical resistance between conductive members in a plasma processing apparatusMAEBASHI SATOSHI·Filed 2011·Application pending·0 cites
- 0841US2019318912A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0940US2005095732A1Plasma processing apparatus and method and apparatus for measuring DC potentialTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Naoyuki Umehara files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →