Inventor · disambiguated record
Neil J. Bassom
Also filed as: BASSOM NEIL · BASSOM NEIL J · BASSOM NEIL JAMES
43 granted patents·18 pending applications·172 citations·filing 2002–2025
97Inventor score
Files withAXCELIS TECH INC32VARIAN SEMICONDUCTOR EQUIPMENT12VARIAN SEMICONDUCTOR EQUIPMENT ASS INC6FEI CO3BILOIU COSTEL1
Top patents by PatentIndex Score
61 records- 0197US11170967B2Liquid metal ion sourceAXCELIS TECH INC·Filed 2020·Granted Nov 9, 2021·9 cites·20 claims
- 0291US8759788B1Ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jun 24, 2014·15 cites·20 claims
- 0391US7674706B2System for modifying small structures using localized charge transfer mechanism to remove or deposit materialFEI CO·Filed 2005·Granted Mar 9, 2010·13 cites·25 claims
- 0489US9287079B2Apparatus for dynamic temperature control of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Mar 15, 2016·9 cites·16 claims
- 0588US9530615B2Techniques for improving the performance and extending the lifetime of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Dec 27, 2016·9 cites·20 claims
- 0687US9396902B2Gallium ION source and materials thereforeBILOIU COSTEL·Filed 2012·Granted Jul 19, 2016·9 cites·10 claims
- 0787US8501624B2Excited gas injection for ion implant controlKOO BON-WOONG·Filed 2008·Granted Aug 6, 2013·11 cites·6 claims
- 0886US11699565B2Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beamAXCELIS TECH INC·Filed 2021·Granted Jul 11, 2023·1 cites·20 claims
- 0985US6838380B2Fabrication of high resistivity structures using focused ion beamsFEI CO·Filed 2002·Granted Jan 4, 2005·37 cites·24 claims
- 1084US10347457B1Dynamic temperature control of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jul 9, 2019·3 cites·20 claims
- 1184US8330127B2Flexible ion sourceLOW RUSSELL J·Filed 2008·Granted Dec 11, 2012·8 cites·17 claims
- 1284US8163641B2System for modifying small structuresGU GEORGE Y·Filed 2010·Granted Apr 24, 2012·5 cites·18 claims
- 1378US12431332B2High energy implanter with small footprintAXCELIS TECH INC·Filed 2023·Granted Sep 30, 2025·0 cites·20 claims
- 1478US12154763B2Hydraulic feed system for an ion sourceAXCELIS TECH INC·Filed 2023·Granted Nov 26, 2024·0 cites·19 claims
- 1578US12051561B2Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beamAXCELIS TECH INC·Filed 2023·Granted Jul 30, 2024·0 cites·20 claims
- 1678US8003959B2Ion source cleaning end point detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Aug 23, 2011·4 cites·11 claims
- 1776US9773636B2Apparatus and method for generating high current negative hydrogen ion beamVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2015·Granted Sep 26, 2017·2 cites·13 claims
- 1876US7723699B2Cathode having electron production and focusing grooves, ion source and related methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted May 25, 2010·3 cites·20 claims
- 1974US12476085B2Shielded gas inlet for an ion sourceAXCELIS TECH INC·Filed 2022·Granted Nov 18, 2025·0 cites·29 claims
- 2073US9018829B2Excited gas injection for ion implant controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Apr 28, 2015·2 cites·12 claims
- 2172US12112918B2Dual source injector with switchable analyzing magnetAXCELIS TECH INC·Filed 2023·Granted Oct 8, 2024·0 cites·20 claims
- 2272US9142392B2Self-cleaning radio frequency plasma sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Sep 22, 2015·2 cites·17 claims
- 2372US8022371B2Cathode having electron production and focusing grooves, ion source and related methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Granted Sep 20, 2011·2 cites·7 claims
- 2471US11728140B1Hydraulic feed system for an ion sourceAXCELIS TECH INC·Filed 2022·Granted Aug 15, 2023·0 cites·20 claims
- 2571US10720354B2System and method for aligning light-transmitting birefringent workpiecesAXCELIS TECH INC·Filed 2018·Granted Jul 21, 2020·1 cites·20 claims
- 2671US10573485B1Tetrode extraction apparatus for ion sourceAXCELIS TECH INC·Filed 2018·Granted Feb 25, 2020·1 cites·20 claims
- 2771US9741522B1Ceramic ion source chamberVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Aug 22, 2017·1 cites·18 claims
- 2869US9275820B2Gas coupled arc chamber coolingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Mar 1, 2016·2 cites·18 claims
- 2969US2025207239A1Liquid metal alloy feed materials for ion implantationAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 3068US8455839B2Cleaning of an extraction aperture of an ion sourceCHANEY CRAIG R·Filed 2010·Granted Jun 4, 2013·2 cites·14 claims
- 3167US8049192B2Apparatus and system for controlling ion ribbon beam uniformity in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Nov 1, 2011·1 cites·18 claims
- 3267US6863787B2Dummy copper deprocessingFEI CO·Filed 2003·Granted Mar 8, 2005·17 cites·27 claims
- 3366US11244800B2Stepped indirectly heated cathode with improved shieldingAXCELIS TECH INC·Filed 2021·Granted Feb 8, 2022·0 cites·21 claims
- 3465US9187832B2Extended lifetime ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 17, 2015·1 cites·19 claims
- 3565US2025253125A1System and method for managing solid phase precursors for an ion implantation systemAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 3664US11823858B2Dual source injector with switchable analyzing magnetAXCELIS TECH INC·Filed 2022·Granted Nov 21, 2023·0 cites·20 claims
- 3764US8937003B2Technique for ion implanting a targetPEREL ALEXANDER S·Filed 2012·Granted Jan 20, 2015·2 cites·19 claims
- 3864US2025087448A1Ion beam profiling using optical tomographyAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 3963US2025277303A1Low-temperature vaporizer for ion implanter with in-vacuum controlled flowAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 4063US2025308841A1Dopant delivery system to ion source using induction heatingAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 4163US2025188592A1High-efficiency target for an ion sourceAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 4263US2025118524A1Actively heated target to generate an ion beamAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 4362US2025087451A1Dual cathode temperature-controlled multi-cathode ion sourceAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 4461US2025198946A1Wafer alignment, cleanliness, and surface quality verification using laser light scatteringAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 4560US9134074B2Method and apparatus for thermal control of ion sources and sputtering targetsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2012·Granted Sep 15, 2015·0 cites·5 claims
- 4660US2025167021A1Deposition monitor for semiconductor manufacturing systemAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 4759US9887060B2Ceramic ion source chamberVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Feb 6, 2018·0 cites·21 claims
- 4859US2025308842A1Semiconductor electrical insulator with reduced arcingAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 4958US11699563B2Etching aluminum nitride or aluminum oxide to generate an aluminum ion beamAXCELIS TECH INC·Filed 2021·Granted Jul 11, 2023·0 cites·14 claims
- 5058US2025259816A1Ion stripping apparatus and ion implantation system with selectable stripping gas sourceAXCELIS TECH INC·Filed 2025·Application pending·0 cites
Showing the top 50 of 61 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →