Inventor · disambiguated record
Neil M.P. Benjamin
Also filed as: BENJAMIN NEIL · BENJAMIN NEIL M P
2 granted patents·2 pending applications·282 citations·filing 1994–2021
72Inventor score
Files withLAM RES CORP4
Top patents by PatentIndex Score
4 records- 0194US5948704AHigh flow vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate supportLAM RES CORP·Filed 1996·Granted Sep 7, 1999·207 cites·28 claims
- 0281US5589737APlasma processor for large workpiecesLAM RES CORP·Filed 1994·Granted Dec 31, 1996·75 cites·36 claims
- 0353US2023134296A1Transformer Isolator Having RF Shield Structure for Effective Magnetic Power TransferLAM RES CORP·Filed 2021·Application pending·0 cites
- 0451US2023290611A1Distributed plasma source arrayLAM RES CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →