Inventor · disambiguated record
Neal R. Rueger
Also filed as: RUEGER NEAL · RUEGER NEAL R
61 granted patents·20 pending applications·514 citations·filing 2000–2015
99Inventor score
Files withMICRON TECHNOLOGY INC59RUEGER NEAL R16SANT SANKET2SANDHU GURTEJ S1SUBRAMANIAN KRUPAKAR MURALI1
Top patents by PatentIndex Score
81 records- 0198US8828883B2Methods and apparatuses for energetic neutral flux generation for processing a substrateRUEGER NEAL R·Filed 2010·Granted Sep 9, 2014·56 cites·12 claims
- 0298US7560390B2Multiple spacer steps for pitch multiplicationMICRON TECHNOLOGY INC·Filed 2005·Granted Jul 14, 2009·68 cites·23 claims
- 0396US7262555B2Method and system for discretely controllable plasma processingMICRON TECHNOLOGY INC·Filed 2005·Granted Aug 28, 2007·31 cites·25 claims
- 0495US7279377B2Method and structure for shallow trench isolation during integrated circuit device manufactureMICRON TECHNOLOGY INC·Filed 2005·Granted Oct 9, 2007·40 cites·14 claims
- 0594US7569484B2Plasma and electron beam etching device and methodMICRON TECHNOLOGY INC·Filed 2006·Granted Aug 4, 2009·23 cites·35 claims
- 0693US9117766B2Method for positioning spacers in pitch multiplicationMICRON TECHNOLOGY INC·Filed 2014·Granted Aug 25, 2015·9 cites·18 claims
- 0793US8865598B2Method for positioning spacers in pitch multiplicationMICRON TECHNOLOGY INC·Filed 2013·Granted Oct 21, 2014·9 cites·19 claims
- 0892US8003542B2Multiple spacer steps for pitch multiplicationMICRON TECHNOLOGY INC·Filed 2009·Granted Aug 23, 2011·12 cites·16 claims
- 0992US7662648B2Integrated circuit inspection systemMICRON TECHNOLOGY INC·Filed 2005·Granted Feb 16, 2010·16 cites·13 claims
- 1091US7718080B2Electronic beam processing device and method using carbon nanotube emitterMICRON TECHNOLOGY INC·Filed 2006·Granted May 18, 2010·15 cites·24 claims
- 1190US8598041B2Method for positioning spacers in pitch multiplicationSANT SANKET·Filed 2012·Granted Dec 3, 2013·8 cites·22 claims
- 1288US7791071B2Profiling solid state samplesMICRON TECHNOLOGY INC·Filed 2006·Granted Sep 7, 2010·10 cites·15 claims
- 1388US7649316B2Assemblies for plasma-enhanced treatment of substratesMICRON TECHNOLOGY INC·Filed 2007·Granted Jan 19, 2010·20 cites·12 claims
- 1487US8173550B2Method for positioning spacers for pitch multiplicationSANT SANKET·Filed 2011·Granted May 8, 2012·5 cites·20 claims
- 1586US7557047B2Method of forming a layer of material using an atomic layer deposition processMICRON TECHNOLOGY INC·Filed 2006·Granted Jul 7, 2009·6 cites·11 claims
- 1685US7833427B2Electron beam etching device and methodMICRON TECHNOLOGY INC·Filed 2006·Granted Nov 16, 2010·8 cites·28 claims
- 1785US6660657B1Methods of incorporating nitrogen into silicon-oxide-containing layersMICRON TECHNOLOGY INC·Filed 2000·Granted Dec 9, 2003·20 cites·10 claims
- 1884US8389415B2Profiling solid state samplesRUEGER NEAL R·Filed 2010·Granted Mar 5, 2013·5 cites·23 claims
- 1984US6589611B1Deposition and chamber treatment methodsMICRON TECHNOLOGY INC·Filed 2002·Granted Jul 8, 2003·27 cites·68 claims
- 2082US8256293B2Devices comprising nanotubes for use as sensors and/or transducers, and related methodsRUEGER NEAL R·Filed 2010·Granted Sep 4, 2012·5 cites·25 claims
- 2180US7819005B2Sensor and transducer devices comprising carbon nanotubes, methods of making and using the sameMICRON TECHNOLOGY INC·Filed 2007·Granted Oct 26, 2010·7 cites·30 claims
- 2279US7402526B2Plasma processing, deposition, and ALD methodsMICRON TECHNOLOGY INC·Filed 2006·Granted Jul 22, 2008·4 cites·19 claims
- 2377US7632737B2Protection in integrated circuitsMICRON TECHNOLOGY INC·Filed 2006·Granted Dec 15, 2009·6 cites·37 claims
- 2475US9257294B2Methods and apparatuses for energetic neutral flux generation for processing a substrateMICRON TECHNOLOGY INC·Filed 2014·Granted Feb 9, 2016·2 cites·19 claims
- 2575US7517558B2Methods for positioning carbon nanotubesMICRON TECHNOLOGY INC·Filed 2005·Granted Apr 14, 2009·3 cites·3 claims
- 2675US7273793B2Methods of filling gaps using high density plasma chemical vapor depositionMICRON TECHNOLOGY INC·Filed 2005·Granted Sep 25, 2007·1 cites·19 claims
- 2774US9061297B2Device for controlling placement of nanoparticlesMICRON TECHNOLOGY INC·Filed 2014·Granted Jun 23, 2015·2 cites·10 claims
- 2873US7344948B2Methods of forming transistorsMICRON TECHNOLOGY INC·Filed 2002·Granted Mar 18, 2008·9 cites·11 claims
- 2973US6660658B2Transistor structures, methods of incorporating nitrogen into silicon-oxide-containing layers; and methods of forming transistorsMICRON TECHNOLOGY INC·Filed 2002·Granted Dec 9, 2003·9 cites·11 claims
- 3073US6627465B2System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2001·Granted Sep 30, 2003·9 cites·27 claims
- 3171US8414787B2Electron beam processing device and method using carbon nanotube emitterRUEGER NEAL R·Filed 2010·Granted Apr 9, 2013·2 cites·22 claims
- 3270US7459757B2Transistor structuresMICRON TECHNOLOGY INC·Filed 2002·Granted Dec 2, 2008·7 cites·3 claims
- 3369US7432166B2Methods of forming a nitrogen enriched regionMICRON TECHNOLOGY INC·Filed 2002·Granted Oct 7, 2008·7 cites·10 claims
- 3468US9099272B2Field emission devices and methods for making the sameMICRON TECHNOLOGY INC·Filed 2014·Granted Aug 4, 2015·1 cites·20 claims
- 3568US8609542B2Profiling solid state samplesMICRON TECHNOLOGY INC·Filed 2013·Granted Dec 17, 2013·1 cites·20 claims
- 3668US7114404B2System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2003·Granted Oct 3, 2006·7 cites·17 claims
- 3768US6950178B2Method and system for monitoring plasma using optical emission spectroscopyMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 27, 2005·6 cites·39 claims
- 3867US2009239389A1Method of Forming a Layer of Material Using an Atomic Layer Deposition ProcessMICRON TECHNOLOGY INC·Filed 2009·Application pending·0 cites
- 3965US7255128B2System and method for detecting flow in a mass flow controllerMICRON TECHNOLOGY INC·Filed 2006·Granted Aug 14, 2007·2 cites·27 claims
- 4064US6936547B2Gas delivery system for deposition processes, and methods of using sameMICRON TECHNOLOGY INC·Filed 2002·Granted Aug 30, 2005·5 cites·113 claims
- 4163US7189287B2Atomic layer deposition using electron bombardmentMICRON TECHNOLOGY INC·Filed 2004·Granted Mar 13, 2007·4 cites·69 claims
- 4262US8033884B2Methods of forming plasma-generating structures; methods of plasma-assisted etching, and methods of plasma-assisted depositionMICRON TECHNOLOGY INC·Filed 2009·Granted Oct 11, 2011·1 cites·32 claims
- 4362US7628855B2Atomic layer deposition using electron bombardmentMICRON TECHNOLOGY INC·Filed 2007·Granted Dec 8, 2009·0 cites·20 claims
- 4462US7056833B2Methods of filling gaps and methods of depositing materials using high density plasma chemical vapor depositionMICRON TECHNOLOGY INC·Filed 2003·Granted Jun 6, 2006·3 cites·7 claims
- 4561US7202183B2Method of filling gaps and methods of depositing materials using high density plasma chemical vapor depositionMICRON TECHNOLOGY INC·Filed 2006·Granted Apr 10, 2007·0 cites·5 claims
- 4660US9610593B2Device for positioning nanoparticlesMICRON TECHNOLOGY INC·Filed 2015·Granted Apr 4, 2017·0 cites·20 claims
- 4760US8058130B2Method of forming a nitrogen-enriched region within silicon-oxide-containing massesSANDHU GURTEJ S·Filed 2008·Granted Nov 15, 2011·0 cites·11 claims
- 4858US8003000B2Plasma processing, deposition and ALD methodsMICRON TECHNOLOGY INC·Filed 2008·Granted Aug 23, 2011·0 cites·20 claims
- 4958US6606802B2Cleaning efficiency improvement in a high density plasma process chamber using thermally hot gasMICRON TECHNOLOGY INC·Filed 2001·Granted Aug 19, 2003·6 cites·64 claims
- 5057US6908807B2Methods of forming semiconductor constructionsMICRON TECHNOLOGY INC·Filed 2002·Granted Jun 21, 2005·6 cites·48 claims
Showing the top 50 of 81 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →