Inventor · disambiguated record
Nicole Auth
Also filed as: AUTH NICOLE
8 granted patents·5 pending applications·22 citations·filing 2008–2024
79Inventor score
Top patents by PatentIndex Score
13 records- 0186US8632687B2Method for electron beam induced etching of layers contaminated with galliumAUTH NICOLE·Filed 2009·Granted Jan 21, 2014·14 cites·24 claims
- 0274US11650495B2Apparatus and method for determining a position of an element on a photolithographic maskZEISS CARL SMT GMBH·Filed 2022·Granted May 16, 2023·0 cites·20 claims
- 0374US9023666B2Method for electron beam induced etchingAUTH NICOLE·Filed 2009·Granted May 5, 2015·5 cites·26 claims
- 0470US8623230B2Methods and systems for removing a material from a sampleAUTH NICOLE·Filed 2008·Granted Jan 7, 2014·3 cites·37 claims
- 0565US11385540B2Apparatus and method for determining a position of an element on a photolithographic maskZEISS CARL SMT GMBH·Filed 2020·Granted Jul 12, 2022·0 cites·20 claims
- 0659US2024219844A1Method and apparatus for determining optical properties of deposition materials used for lithographic masksZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0757US2024272099A1High resolution, low energy electron microscope for providing topography information and method of mask inspectionZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0855US12135540B2Devices and methods for examining and/or processing an element for photolithographyZEISS CARL SMT GMBH·Filed 2020·Granted Nov 5, 2024·0 cites·24 claims
- 0955US2023238209A1Apparatus for analyzing and/or processing a sample with a particle beam and methodZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1053US11487211B2Device and method for processing a microstructured componentZEISS CARL SMT GMBH·Filed 2020·Granted Nov 1, 2022·0 cites·31 claims
- 1152US2024186109A1Method and apparatus for repairing a defect of a sample using a focused particle beamZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 1248US8318593B2Method for electron beam induced deposition of conductive materialAUTH NICOLE·Filed 2009·Granted Nov 27, 2012·0 cites·21 claims
- 1340US2014255831A1Method and apparatus for protecting a substrate during processing by a particle beamZEISS CARL SMS GMBH·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →