Inventor · disambiguated record
Nian-Fuh Cheng
Also filed as: CHENG NIAN-FUH
13 granted patents·207 citations·filing 2011–2017
92Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD4TAIWAN SEMICONDUCTOR MFG3WANG HUNG-CHUN3CHANG CHING-HSU1CHEN PEI-SHIANG1
Top patents by PatentIndex Score
13 records- 0197US8601407B2Geometric pattern data quality verification for maskless lithographyWANG HUNG-CHUN·Filed 2011·Granted Dec 3, 2013·31 cites·20 claims
- 0297US8473877B2Striping methodology for maskless lithographyWANG HUNG-CHUN·Filed 2011·Granted Jun 25, 2013·26 cites·20 claims
- 0396US8945803B2Smart subfield method for E-beam lithographyTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Feb 3, 2015·26 cites·20 claims
- 0496US8468473B1Method for high volume e-beam lithographyWANG HUNG-CHUN·Filed 2012·Granted Jun 18, 2013·34 cites·20 claims
- 0595US8609308B1Smart subfield method for E-beam lithographyCHEN PEI-SHIANG·Filed 2012·Granted Dec 17, 2013·31 cites·20 claims
- 0693US8745550B2Fracture aware OPCCHENG NIAN-FUH·Filed 2012·Granted Jun 3, 2014·38 cites·15 claims
- 0790US9023695B2Method of patterning features of a semiconductor deviceTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted May 5, 2015·11 cites·15 claims
- 0886US10324369B2Methods for generating a mandrel maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jun 18, 2019·4 cites·19 claims
- 0982US9911606B2Mandrel spacer patterning in multi-pitch integrated circuit manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Mar 6, 2018·3 cites·20 claims
- 1079US9091930B2Enhanced EUV lithography systemCHANG CHING-HSU·Filed 2012·Granted Jul 28, 2015·2 cites·20 claims
- 1174US9395618B2Enhanced EUV lithography systemTAIWAN SEMICONDUCTOR MFG·Filed 2015·Granted Jul 19, 2016·1 cites·20 claims
- 1259US9880460B2Enhanced EUV lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 30, 2018·0 cites·20 claims
- 1350US9627262B2Method of patterning features of a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 18, 2017·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Nian-Fuh Cheng files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →