Inventor · disambiguated record
Nikolai Kalnin
Also filed as: KALNIN NIKOLAI · KALNIN NIKOLAI NIKOLAEVICH
6 granted patents·3 pending applications·13 citations·filing 2016–2019
74Inventor score
Top patents by PatentIndex Score
9 records- 0189US11049755B2Semiconductor substrate supports with embedded RF shieldAPPLIED MATERIALS INC·Filed 2018·Granted Jun 29, 2021·8 cites·17 claims
- 0280US10559451B2Apparatus with concentric pumping for multiple pressure regimesAPPLIED MATERIALS INC·Filed 2017·Granted Feb 11, 2020·3 cites·19 claims
- 0375US10903052B2Systems and methods for radial and azimuthal control of plasma uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Jan 26, 2021·1 cites·18 claims
- 0470US10431429B2Systems and methods for radial and azimuthal control of plasma uniformityAPPLIED MATERIALS INC·Filed 2017·Granted Oct 1, 2019·1 cites·20 claims
- 0543US10920320B2Plasma health determination in semiconductor substrate processing reactorsAPPLIED MATERIALS INC·Filed 2017·Granted Feb 16, 2021·0 cites·12 claims
- 0641US2019119815A1Systems and processes for plasma filteringAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 0740US10672642B2Systems and methods for pedestal configurationAPPLIED MATERIALS INC·Filed 2018·Granted Jun 2, 2020·0 cites·20 claims
- 0833US2017016954A1Systems and methods for generating and preserving vacuum between semiconductor wafer and wafer translatorTRANSLARITY INC·Filed 2016·Application pending·0 cites
- 0932US2017023642A1Lost motion gasket for semiconductor test, and associated systems and methodsTRANSLARITY INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →