Inventor · disambiguated record
Nitin Khurana
Also filed as: KHURANA NITIN
16 granted patents·3 pending applications·2,022 citations·filing 1995–2023
96Inventor score
Files withAPPLIED MATERIALS INC18
Top patents by PatentIndex Score
19 records- 0197US6117245AMethod and apparatus for controlling cooling and heating fluids for a gas distribution plateAPPLIED MATERIALS INC·Filed 1998·Granted Sep 12, 2000·252 cites·19 claims
- 0296US6436819B1Nitrogen treatment of a metal nitride/metal stackAPPLIED MATERIALS INC·Filed 2000·Granted Aug 20, 2002·576 cites·25 claims
- 0396US6190037B1Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring systemAPPLIED MATERIALS INC·Filed 1999·Granted Feb 20, 2001·455 cites·27 claims
- 0495US6358810B1Method for superior step coverage and interface control for high K dielectric capacitors and related electrodesAPPLIED MATERIALS INC·Filed 1998·Granted Mar 19, 2002·154 cites·37 claims
- 0595US6350320B1Heater for processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Feb 26, 2002·293 cites·28 claims
- 0691US6433314B1Direct temperature control for a component of a substrate processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Aug 13, 2002·62 cites·32 claims
- 0788US5650052AVariable cell size collimatorFiled 1995·Granted Jul 22, 1997·61 cites·22 claims
- 0887US10770321B2Process kit erosion and service life predictionAPPLIED MATERIALS INC·Filed 2019·Granted Sep 8, 2020·4 cites·17 claims
- 0986US10177018B2Process kit erosion and service life predictionAPPLIED MATERIALS INC·Filed 2017·Granted Jan 8, 2019·4 cites·17 claims
- 1082US5861086AMethod and apparatus for sputter etch conditioning a ceramic bodyAPPLIED MATERIALS INC·Filed 1997·Granted Jan 19, 1999·35 cites·21 claims
- 1177US5972178AContinuous process for forming improved titanium nitride barrier layersAPPLIED MATERIALS INC·Filed 1995·Granted Oct 26, 1999·52 cites·6 claims
- 1265US6345642B1Method and apparatus for removing processing liquid from a processing liquid pathAPPLIED MATERIALS INC·Filed 1999·Granted Feb 12, 2002·31 cites·27 claims
- 1364US6908865B2Method and apparatus for cleaning substratesAPPLIED MATERIALS INC·Filed 2001·Granted Jun 21, 2005·10 cites·6 claims
- 1463US5956608AModulating surface morphology of barrier layersAPPLIED MATERIALS INC·Filed 1996·Granted Sep 21, 1999·29 cites·13 claims
- 1558US11837448B2High-temperature chamber and chamber component cleaning and maintenance method and apparatusAPPLIED MATERIALS INC·Filed 2021·Granted Dec 5, 2023·0 cites·22 claims
- 1655US2024404848A1Mobile Cart for Commissioning Semiconductor Processing ToolAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1748US2005252454A1Contaminant reducing substrate transport and support systemAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 1843US2008105201A1Substrate support components having quartz contact tipsAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1941US6395157B2Method and apparatus for sputter etch conditioning a ceramic bodyAPPLIED MATERIALS INC·Filed 1998·Granted May 28, 2002·4 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →