Inventor · disambiguated record
Nitesh Pandey
Also filed as: PANDEY NITESH
55 granted patents·6 pending applications·100 citations·filing 2015–2024
97Inventor score
Top patents by PatentIndex Score
61 records- 0196US10067426B2Metrology apparatus for measuring a structure formed on a substrate by a lithographic process, lithographic system, and method of measuring a structure formed on a substrate by a lithographic processASML NETHERLANDS BV·Filed 2017·Granted Sep 4, 2018·8 cites·20 claims
- 0295US10816909B2Metrology system and method for determining a characteristic of one or more structures on a substrateASML NETHERLANDS BV·Filed 2018·Granted Oct 27, 2020·5 cites·17 claims
- 0394US11385553B2Metrology method, patterning device, apparatus and computer programASML NETHERLANDS BV·Filed 2021·Granted Jul 12, 2022·2 cites·20 claims
- 0494US9909983B2Method and apparatus for improving measurement accuracyASML NETHERLANDS BV·Filed 2016·Granted Mar 6, 2018·7 cites·20 claims
- 0593US11262661B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 1, 2022·4 cites·18 claims
- 0693US9632039B2Inspection apparatus, inspection method and manufacturing methodVRIJE UNIV AMSTERDAM·Filed 2015·Granted Apr 25, 2017·14 cites·19 claims
- 0792US10775704B2Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use thereinASML NETHERLANDS BV·Filed 2019·Granted Sep 15, 2020·4 cites·20 claims
- 0892US10393514B2Topography measurement systemASML NETHERLANDS BV·Filed 2016·Granted Aug 27, 2019·4 cites·15 claims
- 0991US10444640B2Metrology apparatus, lithographic system, and method of measuring a structureASML NETHERLANDS BV·Filed 2018·Granted Oct 15, 2019·4 cites·20 claims
- 1090US10895452B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Jan 19, 2021·3 cites·15 claims
- 1189US12366811B2Metrology system and method for determining a characteristic of one or more structures on a substrateASML NETHERLANDS BV·Filed 2024·Granted Jul 22, 2025·0 cites·20 claims
- 1289US11940739B2Metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Mar 26, 2024·1 cites·19 claims
- 1388US10365565B2Method of measuring a structure, inspection apparatus, lithographic system, device manufacturing method and wavelength-selective filter for use thereinASML NETHERLANDS BV·Filed 2017·Granted Jul 30, 2019·3 cites·13 claims
- 1487US10983445B2Method and apparatus for measuring a parameter of interest using image plane detection techniquesASML NETHERLANDS BV·Filed 2019·Granted Apr 20, 2021·3 cites·20 claims
- 1587US10895812B2Metrology apparatus, lithographic system, and method of measuring a structureASML NETHERLANDS BV·Filed 2017·Granted Jan 19, 2021·4 cites·20 claims
- 1687US10788758B2Method of measuring a parameter of interest, device manufacturing method, metrology apparatus, and lithographic systemASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·3 cites·19 claims
- 1787US10191391B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2016·Granted Jan 29, 2019·4 cites·19 claims
- 1886US11415900B2Metrology system and method for determining a characteristic of one or more structures on a substrateASML NETHERLANDS BV·Filed 2020·Granted Aug 16, 2022·1 cites·20 claims
- 1986US10996570B2Metrology method, patterning device, apparatus and computer programASML NETHERLANDS BV·Filed 2019·Granted May 4, 2021·2 cites·25 claims
- 2086US10795269B2Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Oct 6, 2020·3 cites·15 claims
- 2186US10747124B2Method of measuring a target, metrology apparatus, polarizer assemblyASML NETHERLANDS BV·Filed 2019·Granted Aug 18, 2020·2 cites·11 claims
- 2285US10670975B2Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measuredASML NETHERLANDS BV·Filed 2016·Granted Jun 2, 2020·2 cites·20 claims
- 2384US10845304B2Scatterometer and method of scatterometry using acoustic radiationASML NETHERLANDS BV·Filed 2018·Granted Nov 24, 2020·2 cites·12 claims
- 2484US10678145B2Radiation receiving systemASML NETHERLANDS BV·Filed 2018·Granted Jun 9, 2020·2 cites·20 claims
- 2584US10599047B2Metrology apparatus, lithographic system, and method of measuring a structureASML NETHERLANDS BV·Filed 2018·Granted Mar 24, 2020·2 cites·15 claims
- 2681US10656534B2Method of measuring, device manufacturing method, metrology apparatus, and lithographic systemASML NETHERLANDS BV·Filed 2019·Granted May 19, 2020·2 cites·20 claims
- 2779US10444638B2Method for parameter determination and apparatus thereofASML NETHERLANDS BV·Filed 2018·Granted Oct 15, 2019·1 cites·13 claims
- 2878US11454887B2Metrology apparatus and method for determining a characteristic of one or more structures on a substrateASML NETHERLANDS BV·Filed 2019·Granted Sep 27, 2022·1 cites·14 claims
- 2978US11086240B2Metrology sensor, lithographic apparatus and method for manufacturing devicesASML NETHERLANDS BV·Filed 2017·Granted Aug 10, 2021·2 cites·15 claims
- 3078US10310389B2Method of measuring, device manufacturing method, metrology apparatus, and lithographic systemASML NETHERLANDS BV·Filed 2018·Granted Jun 4, 2019·1 cites·20 claims
- 3178US10234767B2Device and method for processing a radiation beam with coherenceASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·1 cites·19 claims
- 3278US2024404036A1Detection apparatus for simultaneous acquisition of multiple diverse images of an objectASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 3377US12007700B2Metrology system and method for determining a characteristic of one or more structures on a substrateASML NETHERLANDS BV·Filed 2022·Granted Jun 11, 2024·0 cites·20 claims
- 3477US10353298B2Method of measuring a target, metrology apparatus, polarizer assemblyASML NETHERLANDS BV·Filed 2017·Granted Jul 16, 2019·1 cites·20 claims
- 3576US10180630B2Illumination system for a lithographic or inspection apparatusASML NETHERLANDS BV·Filed 2017·Granted Jan 15, 2019·2 cites·20 claims
- 3670US11536654B2Scatterometer and method of scatterometry using acoustic radiationASML NETHERLANDS BV·Filed 2020·Granted Dec 27, 2022·0 cites·20 claims
- 3770US10996571B2Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measuredASML NETHERLANDS BV·Filed 2020·Granted May 4, 2021·0 cites·21 claims
- 3868US11549806B2Metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Jan 10, 2023·0 cites·20 claims
- 3964US11782351B2Metrology device and detection apparatus thereforASML NETHERLANDS BV·Filed 2020·Granted Oct 10, 2023·0 cites·15 claims
- 4063US12086973B2Detection apparatus for simultaneous acquisition of multiple diverse images of an objectASML NETHERLANDS BV·Filed 2020·Granted Sep 10, 2024·0 cites·14 claims
- 4163US10935373B2Topography measurement systemASML NETHERLANDS BV·Filed 2019·Granted Mar 2, 2021·0 cites·20 claims
- 4263US10423077B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2018·Granted Sep 24, 2019·0 cites·18 claims
- 4362US12158435B2Illumination and detection apparatus for a metrology apparatusASML NETHERLANDS BV·Filed 2020·Granted Dec 3, 2024·0 cites·20 claims
- 4461US12276784B2Micromirror arraysASML NETHERLANDS BV·Filed 2020·Granted Apr 15, 2025·0 cites·30 claims
- 4561US12259546B2Micromirror arraysASML NETHERLANDS BV·Filed 2020·Granted Mar 25, 2025·0 cites·23 claims
- 4661US10908514B2Metrology apparatus, lithographic system, and method of measuring a structureASML NETHERLANDS BV·Filed 2019·Granted Feb 2, 2021·0 cites·20 claims
- 4759US12164233B2Metrology method and apparatus for of determining a complex-valued fieldASML NETHERLANDS BV·Filed 2020·Granted Dec 10, 2024·0 cites·14 claims
- 4858US11675276B2Metrology apparatus and photonic crystal fiberASML NETHERLANDS BV·Filed 2019·Granted Jun 13, 2023·0 cites·11 claims
- 4957US12117734B2Metrology method and device for determining a complex-valued fieldASML NETHERLANDS BV·Filed 2020·Granted Oct 15, 2024·0 cites·15 claims
- 5057US10620550B2Metrology method and apparatusASML NETHERLANDS BV·Filed 2018·Granted Apr 14, 2020·0 cites·17 claims
Showing the top 50 of 61 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →