Inventor · disambiguated record
Nikolay Nikolaevitch Salashchenko
Also filed as: SALASHCHENKO NIKOLAY · SALASHCHENKO NIKOLAY NIKOLAEVI · SALASHCHENKO NIKOLAY NIKOLAEVITCH
4 granted patents·35 citations·filing 2005–2012
73Inventor score
Top patents by PatentIndex Score
4 records- 0192US7372623B2Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·19 cites·23 claims
- 0290US7639418B2Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2008·Granted Dec 29, 2009·13 cites·23 claims
- 0363US9448492B2Multilayer mirror, method of producing a multilayer mirror and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Sep 20, 2016·2 cites·12 claims
- 0456US9082521B2EUV multilayer mirror with interlayer and lithographic apparatus using the mirrorGLUSHKOV DENIS ALEXANDROVICH·Filed 2010·Granted Jul 14, 2015·1 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →