Inventor · disambiguated record
Norman Baer
Also filed as: BAER NORMAN · BAER NORMAN W
12 granted patents·2 pending applications·113 citations·filing 1975–2023
90Inventor score
Files withZEISS CARL SMT GMBH9LOERING ULRICH1MARQUETTE ELECTRONICS INC1UNIV COLORADO1UNIV COLORADO FOUNDATION1
Top patents by PatentIndex Score
14 records- 0191US9316929B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2013·Granted Apr 19, 2016·10 cites·22 claims
- 0290US10031423B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2017·Granted Jul 24, 2018·4 cites·20 claims
- 0388US4018241AMethod and inlet control system for controlling a gas flow sample to an evacuated chamberUNIV COLORADO·Filed 1975·Granted Apr 19, 1977·39 cites·8 claims
- 0483US9207541B2Arrangement for mirror temperature measurement and/or thermal actuation of a mirror in a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2013·Granted Dec 8, 2015·6 cites·25 claims
- 0574US9671703B2Optical arrangement, EUV lithography apparatus and method for configuring an optical arrangementZEISS CARL SMT GMBH·Filed 2014·Granted Jun 6, 2017·2 cites·24 claims
- 0672US9575224B2Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objectiveZEISS CARL SMT GMBH·Filed 2013·Granted Feb 21, 2017·3 cites·22 claims
- 0768US10684551B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2019·Granted Jun 16, 2020·0 cites·9 claims
- 0868US5412207AMethod and apparatus for analyzing a gas sampleMARQUETTE ELECTRONICS INC·Filed 1993·Granted May 2, 1995·21 cites·31 claims
- 0967US4993725AUnitary skate assembly having vertical spring meansUNIV COLORADO FOUNDATION·Filed 1990·Granted Feb 19, 1991·28 cites·34 claims
- 1063US10317802B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2018·Granted Jun 11, 2019·0 cites·21 claims
- 1158US9746778B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2016·Granted Aug 29, 2017·0 cites·14 claims
- 1247US9201226B2Imaging opticsLOERING ULRICH·Filed 2012·Granted Dec 1, 2015·0 cites·20 claims
- 1347US2023176492A1Optical system and method of operating an optical systemZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1433US2010321649A1Optical elementZEISS CARL SMT AG·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →