Inventor · disambiguated record
Noriaki Kanaya
Also filed as: KANAYA NORIAKI
2 granted patents·1 pending application·0 citations·filing 2008–2021
21Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0140US12332630B2Information processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Jun 17, 2025·0 cites·7 claims
- 0240US11681268B2Semiconductor manufacturing system, control device, and control methodTOKYO ELECTRON LTD·Filed 2021·Granted Jun 20, 2023·0 cites·14 claims
- 0340US2010087944A1Semiconductor manufacturing apparatus, method of managing apparatus operation parameters, and programTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →