Inventor · disambiguated record
Nobutaka Kikuiri
Also filed as: KIKUIRI NOBUTAKA
43 granted patents·5 pending applications·449 citations·filing 1988–2020
98Inventor score
Files withNUFLARE TECHNOLOGY INC26TOSHIBA KK17ADVANCED MASK INSPECTION TECH1ISOMURA IKUNAO1KATAOKA AKIRA1
Top patents by PatentIndex Score
48 records- 0197US10572995B2Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2018·Granted Feb 25, 2020·13 cites·6 claims
- 0293US9575010B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Feb 21, 2017·6 cites·20 claims
- 0392US9869650B2Pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Jan 16, 2018·7 cites·10 claims
- 0491US9922415B2Inspection method, inspection apparatus, and inspection systemNUFLARE TECHNOLOGY INC·Filed 2016·Granted Mar 20, 2018·6 cites·11 claims
- 0590US10281415B2Pattern inspection method and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2016·Granted May 7, 2019·9 cites·10 claims
- 0690US8254663B2Ultrafine lithography pattern inspection using multi-stage TDI image sensors with false image removabilityKATAOKA AKIRA·Filed 2009·Granted Aug 28, 2012·14 cites·5 claims
- 0788US7446813B2Active camera apparatus and robot apparatusTOSHIBA KK·Filed 2004·Granted Nov 4, 2008·33 cites·5 claims
- 0887US5323712ATable moving apparatusTOSHIBA KK·Filed 1988·Granted Jun 28, 1994·84 cites·16 claims
- 0986US10629406B2Optical system adjustment method of image acquisition apparatusNUFLARE TECHNOLOGY INC·Filed 2018·Granted Apr 21, 2020·3 cites·8 claims
- 1086US10026011B2Mask inspection apparatus, mask evaluation method and mask evaluation systemNUFLARE TECHNOLOGY INC·Filed 2015·Granted Jul 17, 2018·6 cites·13 claims
- 1186US9728373B2Pattern inspection apparatus and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Aug 8, 2017·4 cites·10 claims
- 1286US5179863AMethod and apparatus for setting the gap distance between a mask and a wafer at a predetermined distanceTOSHIBA KK·Filed 1991·Granted Jan 19, 1993·104 cites·5 claims
- 1384US10777384B2Multiple beam image acquisition apparatus and multiple beam image acquisition methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Sep 15, 2020·3 cites·10 claims
- 1483US8442320B2Pattern inspection apparatus and pattern inspection methodISOMURA IKUNAO·Filed 2010·Granted May 14, 2013·6 cites·10 claims
- 1579US6907388B2Monitoring apparatusTOSHIBA KK·Filed 2003·Granted Jun 14, 2005·32 cites·17 claims
- 1677US9196033B2Inspection sensitivity evaluation methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Nov 24, 2015·4 cites·15 claims
- 1776US9086388B2Pattern evaluation method and apparatusNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jul 21, 2015·2 cites·11 claims
- 1875US8861832B2Inspection system and methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Oct 14, 2014·4 cites·5 claims
- 1970US7264897B2Fuel cell systemTOSHIBA KK·Filed 2003·Granted Sep 4, 2007·7 cites·7 claims
- 2067US9057711B2Inspection apparatus and methodTSUCHIYA HIDEO·Filed 2011·Granted Jun 16, 2015·1 cites·6 claims
- 2167US7225111B2Monitoring apparatusTOSHIBA KK·Filed 2005·Granted May 29, 2007·4 cites·26 claims
- 2267US5134640ASynchrotron radiation apparatusTOSHIBA KK·Filed 1991·Granted Jul 28, 1992·22 cites·18 claims
- 2366US9542586B2Pattern inspection apparatus and pattern inspection methodMATSUMOTO EIJI·Filed 2012·Granted Jan 10, 2017·2 cites·20 claims
- 2464US2020203121A1Optical system adjustment method of image acquisition apparatusNUFLARE TECHNOLOGY INC·Filed 2020·Application pending·0 cites
- 2563US9691143B2Inspection apparatus and inspection apparatus systemNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jun 27, 2017·1 cites·7 claims
- 2663US9235883B2Inspection system and methodNUFLARE TECHNOLOGY INC·Filed 2013·Granted Jan 12, 2016·1 cites·5 claims
- 2763US9165355B1Inspection methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted Oct 20, 2015·2 cites·12 claims
- 2862US10504219B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Dec 10, 2019·1 cites·10 claims
- 2958US7678481B2Fuel cell system with a fuel tank configured to store a fuel at a pressure higher than atmospheric pressureTOSHIBA KK·Filed 2006·Granted Mar 16, 2010·0 cites·11 claims
- 3058US7597982B2Fuel cell system with a gas supply pump that applies negative pressure to the anode and cathodeTOSHIBA KK·Filed 2003·Granted Oct 6, 2009·3 cites·4 claims
- 3158US7104114B2Electronic equipment and fuel cell for the sameTOSHIBA KK·Filed 2004·Granted Sep 12, 2006·3 cites·4 claims
- 3256US5825730AMastering machine having non-repetitive runout compensationTOSHIBA KK·Filed 1996·Granted Oct 20, 1998·27 cites·14 claims
- 3356US2009028542A1Active camera apparatus and robot apparatusTOSHIBA KK·Filed 2008·Application pending·0 cites
- 3452US9116136B2Inspection method and systemNUFLARE TECHNOLOGY INC·Filed 2013·Granted Aug 25, 2015·0 cites·9 claims
- 3551US9140654B2Inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Sep 22, 2015·0 cites·9 claims
- 3649US5130747ACarrier apparatusTOSHIBA KK·Filed 1991·Granted Jul 14, 1992·18 cites·10 claims
- 3747US6103177AMastering apparatus for recording onto a glass master and method for recording onto a glass masterTOSHIBA KK·Filed 1998·Granted Aug 15, 2000·7 cites·17 claims
- 3847US5398271AExposure apparatusTOSHIBA KK·Filed 1994·Granted Mar 14, 1995·8 cites·9 claims
- 3946US9811896B2Measuring apparatusNUFLARE TECHNOLOGY INC·Filed 2014·Granted Nov 7, 2017·0 cites·15 claims
- 4046US9659361B2Measuring apparatus that generates positional deviation distribution of a pattern on a target objectNUFLARE TECHNOLOGY INC·Filed 2014·Granted May 23, 2017·0 cites·9 claims
- 4146US2005008907A1Fuel cell systemTOSHIBA KK·Filed 2004·Application pending·0 cites
- 4243US9530202B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Dec 27, 2016·0 cites·11 claims
- 4343US2010073684A1Xy stage apparatusADVANCED MASK INSPECTION TECH·Filed 2009·Application pending·0 cites
- 4442US10127648B2Pattern inspection apparatus and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Nov 13, 2018·0 cites·10 claims
- 4541US10094791B2Pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Oct 9, 2018·0 cites·6 claims
- 4638US9626755B2Mask inspection apparatus and mask inspection methodNUFLARE TECHNOLOGY INC·Filed 2015·Granted Apr 18, 2017·0 cites·8 claims
- 4736US2016171674A1Inspection method and inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Application pending·0 cites
- 4832US5299251AExposure apparatusTOSHIBA KK·Filed 1993·Granted Mar 29, 1994·2 cites·13 claims
Join the waitlist — get patent alerts
Get an alert when Nobutaka Kikuiri files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →