Inventor · disambiguated record
Noriyuki Kikumoto
Also filed as: KIKUMOTO NORIYUKI
21 granted patents·3 pending applications·14 citations·filing 2014–2023
90Inventor score
Files withSCREEN HOLDINGS CO LTD24
Top patents by PatentIndex Score
24 records- 0180US10727090B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jul 28, 2020·3 cites·16 claims
- 0279US11850623B2Substrate treating apparatus and substrate transporting methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted Dec 26, 2023·1 cites·24 claims
- 0377US10861717B2Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2019·Granted Dec 8, 2020·2 cites·18 claims
- 0474US10229846B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2014·Granted Mar 12, 2019·3 cites·12 claims
- 0571US10921057B2Substrate drying method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Feb 16, 2021·1 cites·8 claims
- 0670US11823929B2Substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2023·Granted Nov 21, 2023·0 cites·20 claims
- 0770US10760852B2Substrate drying method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Sep 1, 2020·1 cites·7 claims
- 0868US10636682B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Apr 28, 2020·1 cites·19 claims
- 0967US10933448B2Substrate treatment apparatus and substrate treatment methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Mar 2, 2021·1 cites·13 claims
- 1064US9947572B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Granted Apr 17, 2018·1 cites·21 claims
- 1159US11594436B2Substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Granted Feb 28, 2023·0 cites·20 claims
- 1254US11342201B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Granted May 24, 2022·0 cites·13 claims
- 1350US10115623B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Oct 30, 2018·0 cites·9 claims
- 1450US2019046900A1Deoxygenation apparatus and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Application pending·0 cites
- 1549US11410865B2Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Granted Aug 9, 2022·0 cites·15 claims
- 1649US11315820B2Substrate processing device and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted Apr 26, 2022·0 cites·16 claims
- 1746US11581208B2Substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Granted Feb 14, 2023·0 cites·20 claims
- 1845US11081376B2Substrate processing apparatus, transfer module, and coupling moduleSCREEN HOLDINGS CO LTD·Filed 2019·Granted Aug 3, 2021·0 cites·25 claims
- 1944US2016288018A1Deoxygenation apparatus and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Application pending·0 cites
- 2044US2022165599A1Substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Application pending·0 cites
- 2143US10573523B2Substrate processing device which performs processing on substrateSCREEN HOLDINGS CO LTD·Filed 2017·Granted Feb 25, 2020·0 cites·10 claims
- 2242US10553422B2Substrate treatment method of treating substrate, and substrate treatment apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted Feb 4, 2020·0 cites·4 claims
- 2341US11823921B2Substrate processing device and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Nov 21, 2023·0 cites·30 claims
- 2436US10741422B2Substrate processing device and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 11, 2020·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →