Inventor · disambiguated record
Norihisa Koga
Also filed as: KOGA NORIHISA
34 granted patents·2 pending applications·351 citations·filing 2000–2023
97Inventor score
Top patents by PatentIndex Score
36 records- 0193US6676757B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2000·Granted Jan 13, 2004·60 cites·12 claims
- 0290US6383948B1Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2000·Granted May 7, 2002·57 cites·19 claims
- 0385US6616760B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Sep 9, 2003·28 cites·14 claims
- 0484US7919727B2Laser processing apparatus and laser processing methodTOKYO ELECTRON LTD·Filed 2006·Granted Apr 5, 2011·10 cites·6 claims
- 0584US7710582B2Laser processing apparatus and laser processing method for cutting and removing a part of a surface region of a substrateTOKYO ELECTRON LTD·Filed 2005·Granted May 4, 2010·11 cites·15 claims
- 0684US7473321B2Laser treatment apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Jan 6, 2009·9 cites·4 claims
- 0783US6872256B2Film forming unitTOKYO ELECTRON LTD·Filed 2003·Granted Mar 29, 2005·25 cites·10 claims
- 0883US6514344B2Film forming unitTOKYO ELECTRON LTD·Filed 2000·Granted Feb 4, 2003·28 cites·39 claims
- 0982US12501004B2Substrate imaging apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Dec 16, 2025·0 cites·6 claims
- 1082US7087118B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2005·Granted Aug 8, 2006·6 cites·9 claims
- 1181US6605153B2Coating film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Aug 12, 2003·26 cites·8 claims
- 1279US7622000B2Laser processing apparatus and laser processing methodTOKYO ELECTRON LTD·Filed 2005·Granted Nov 24, 2009·7 cites·8 claims
- 1378US10795265B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2019·Granted Oct 6, 2020·2 cites·11 claims
- 1477US7518087B2Laser processing apparatus and laser processing methodTOKYO ELECTRON LTD·Filed 2005·Granted Apr 14, 2009·5 cites·13 claims
- 1576US6811613B2Coating film forming apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Nov 2, 2004·17 cites·11 claims
- 1675US10707109B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Jul 7, 2020·2 cites·13 claims
- 1775US6716478B2Coating film forming apparatus and coating film forming methodTOKYO ELECTRON LTD·Filed 2002·Granted Apr 6, 2004·17 cites·7 claims
- 1872US11832026B2Substrate imaging apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Nov 28, 2023·0 cites·4 claims
- 1971US6936107B2Coating film forming apparatus and coating unitTOKYO ELECTRON LTD·Filed 2003·Granted Aug 30, 2005·11 cites·21 claims
- 2070US6761125B2Coating film forming systemTOKYO ELECTRON LTD·Filed 2002·Granted Jul 13, 2004·14 cites·29 claims
- 2169US8088455B2Laser treatment apparatusKOGA NORIHISA·Filed 2008·Granted Jan 3, 2012·3 cites·2 claims
- 2264US10958879B2Substrate imaging apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Mar 23, 2021·0 cites·18 claims
- 2361US9025852B2Substrate inspection apparatus and method for operating the sameHISANO KAZUYA·Filed 2012·Granted May 5, 2015·1 cites·20 claims
- 2461US7641763B2Apparatus and method for removing coating filmTOKYO ELECTRON LTD·Filed 2004·Granted Jan 5, 2010·4 cites·12 claims
- 2560US8730317B2Substrate processing apparatus, substrate processing method and non-transitory computer storage mediumKOGA NORIHISA·Filed 2011·Granted May 20, 2014·1 cites·8 claims
- 2657US11733612B2Substrate processing apparatus and method of processing substrateTOKYO ELECTRON LTD·Filed 2022·Granted Aug 22, 2023·0 cites·9 claims
- 2756US10523905B2Substrate imaging apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Dec 31, 2019·0 cites·12 claims
- 2856US7332056B2Thin film removing device and thin film removing methodTOKYO ELECTRON LTD·Filed 2004·Granted Feb 19, 2008·4 cites·8 claims
- 2954US7879251B2Thin film removing device and thin film removing methodTOKYO ELECTRON LTD·Filed 2007·Granted Feb 1, 2011·0 cites·6 claims
- 3049US8257605B2Apparatus and method for removing coating filmKOBAYASHI SHINJI·Filed 2009·Granted Sep 4, 2012·2 cites·5 claims
- 3147US11353792B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Jun 7, 2022·0 cites·17 claims
- 3246US11256172B2Light irradiating device, light irradiating method and recording mediumTOKYO ELECTRON LTD·Filed 2020·Granted Feb 22, 2022·0 cites·7 claims
- 3346US6932868B2Coating film forming apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Aug 23, 2005·1 cites·4 claims
- 3442US10642168B2Auxiliary exposure apparatus and exposure amount distribution acquisition methodTOKYO ELECTRON LTD·Filed 2017·Granted May 5, 2020·0 cites·13 claims
- 3536US2004261701A1Coating apparatus and coating methodFiled 2002·Application pending·0 cites
- 3636US2001003966A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →