Inventor · disambiguated record
Norbertus Benedictus Koster
Also filed as: KOSTER NORBERTUS B · KOSTER NORBERTUS BENEDICTUS
14 granted patents·4 pending applications·221 citations·filing 2001–2015
91Inventor score
Files withASML NETHERLANDS BV7KOSTER NORBERTUS BENEDICTUS3TNO2MOORS JOHANNES HUBERTUS JOSEPHINA1ROOZEBOOM FREDDY1
Top patents by PatentIndex Score
18 records- 0195US6614505B2Lithographic projection apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Sep 2, 2003·99 cites·20 claims
- 0291US6724460B2Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objectsASML NETHERLANDS BV·Filed 2001·Granted Apr 20, 2004·64 cites·13 claims
- 0389US6828569B2Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Dec 7, 2004·33 cites·4 claims
- 0475US9761458B2Apparatus and method for reactive ion etchingROOZEBOOM FREDDY·Filed 2011·Granted Sep 12, 2017·5 cites·16 claims
- 0571US8961694B2Plasma generator and method for cleaning an objectWIERINGA FOKKO PIETER·Filed 2007·Granted Feb 24, 2015·4 cites·20 claims
- 0665US7959310B2Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical elementZEISS CARL SMT GMBH·Filed 2007·Granted Jun 14, 2011·3 cites·28 claims
- 0765US6862075B2Lithographic projection apparatus, device manufacturing method, and device manufacturing therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 1, 2005·8 cites·33 claims
- 0861US7115886B2Lithographic projection apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Oct 3, 2006·5 cites·5 claims
- 0955US7963144B2Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing systemASML NETHERLANDS BV·Filed 2009·Granted Jun 21, 2011·0 cites·7 claims
- 1050US7624617B2Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing systemASML NETHERLANDS BV·Filed 2006·Granted Dec 1, 2009·0 cites·7 claims
- 1149US8480807B2Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosureKOSTER NORBERTUS BENEDICTUS·Filed 2009·Granted Jul 9, 2013·0 cites·13 claims
- 1248US8446560B2Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing methodMOORS JOHANNES HUBERTUS JOSEPHINA·Filed 2009·Granted May 21, 2013·0 cites·7 claims
- 1344US8749245B2Ion gauge, a monitoring system and a method for determining a total integrated concentration of substances having specific molecular weight in a gas sampleKOSTER NORBERTUS BENEDICTUS·Filed 2009·Granted Jun 10, 2014·0 cites·5 claims
- 1442US2007143032A1Apparatus and method for the detection of a surface reaction, especially for cleaning of an arbitrary two-dimensional surface or three-dimensional bodyZEISS CARL SMT AG·Filed 2006·Application pending·0 cites
- 1542US2014373868A1Surface cleaning device and a method of cleaning a surfaceTNO·Filed 2012·Application pending·0 cites
- 1639US10014165B2Radiation sensor device for high energy photonsTNO·Filed 2015·Granted Jul 3, 2018·0 cites·16 claims
- 1737US2010151394A1System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing MethodSCACCABAROZZI LUIGI·Filed 2009·Application pending·0 cites
- 1829US2013126226A1Method of making a support structureKOSTER NORBERTUS BENEDICTUS·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →