Inventor · disambiguated record

Noboru Masuoka

Also filed as: MASUOKA NOBORU

1 granted patent·1 pending application·208 citations·filing 1993–2004

56Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

2 records

0192US5460684AStage having electrostatic chuck and plasma processing apparatus using sameTOKYO ELECTRON LTD·Filed 1993·Granted Oct 24, 1995·208 cites·13 claims
0227US2005005849A1Semiconductor processing systemFiled 2004·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →