Inventor · disambiguated record
Noriaki Michita
Also filed as: MICHITA NORIAKI
5 granted patents·6 pending applications·1 citations·filing 2012–2024
60Inventor score
Technology areasH10P
Top patents by PatentIndex Score
11 records- 0171US11018033B2Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted May 25, 2021·1 cites·12 claims
- 0255US2023307230A1Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0355US2023307267A1Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0454US2023189407A1Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0552US2022384206A1Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0652US2025006512A1Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2024·Application pending·0 cites
- 0749US2022093435A1Substrate processing apparatus, substrate retainer and method of manufacturing semiconductor deviceKOKUSAI ELECTRIC CORP·Filed 2021·Application pending·0 cites
- 0847US10804110B2Substrate processing apparatus, method of manufacturing semiconductor device and non-transistory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Oct 13, 2020·0 cites·15 claims
- 0945US11264253B2Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Mar 1, 2022·0 cites·6 claims
- 1041US10381241B2Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumHITACHI INT ELECTRIC INC·Filed 2018·Granted Aug 13, 2019·0 cites·16 claims
- 1132US9748132B2Substrate processing apparatus, method for manufacturing semiconductor device, method for processing substratesHARADA KOICHIRO·Filed 2012·Granted Aug 29, 2017·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →