Inventor · disambiguated record
Norimitsu Morioka
Also filed as: MORIOKA NORIMITSU
3 granted patents·139 citations·filing 1993–1997
77Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0182US5689749AApparatus for developing a resist-coated substrateTOKYO ELECTRON LTD·Filed 1995·Granted Nov 18, 1997·68 cites·13 claims
- 0267US5416047AMethod for applying process solution to substratesTOKYO ELECTRON LTD·Filed 1993·Granted May 16, 1995·42 cites·10 claims
- 0365US5826130AApparatus and method for developing resist coated on substrateTOKYO ELECTRON LTD·Filed 1997·Granted Oct 20, 1998·29 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →