Inventor · disambiguated record
Nobutaka Nakao
Also filed as: NAKAO NOBUTAKA
3 granted patents·1 pending application·8 citations·filing 2008–2015
61Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0174US10276405B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Apr 30, 2019·3 cites·3 claims
- 0268US9984907B2Evacuation method and vacuum processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted May 29, 2018·2 cites·7 claims
- 0360US8142609B2Plasma processing apparatusTAKAHASHI SYUICHI·Filed 2008·Granted Mar 27, 2012·3 cites·10 claims
- 0443US2008242086A1Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Nobutaka Nakao files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →