Inventor · disambiguated record
Nobuyuki Takada
Also filed as: TAKADA NOBUYUKI
30 granted patents·7 pending applications·632 citations·filing 1998–2025
97Inventor score
Top patents by PatentIndex Score
37 records- 0194US6609962B1Dressing apparatus and polishing apparatusEBARA CORP·Filed 2000·Granted Aug 26, 2003·85 cites·23 claims
- 0293US6358128B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 19, 2002·61 cites·70 claims
- 0392US11911872B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2021·Granted Feb 27, 2024·2 cites·11 claims
- 0492US7632378B2Polishing apparatusEBARA CORP·Filed 2005·Granted Dec 15, 2009·15 cites·12 claims
- 0592US6878044B2Polishing apparatusEBARA CORP·Filed 2004·Granted Apr 12, 2005·47 cites·18 claims
- 0692US6852019B2Substrate holding apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·49 cites·40 claims
- 0791US11735457B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2020·Granted Aug 22, 2023·2 cites·8 claims
- 0891US7083507B2Substrate holding apparatusEBARA CORP·Filed 2005·Granted Aug 1, 2006·14 cites·37 claims
- 0990US7491117B2Substrate holding apparatusEBARA CORP·Filed 2006·Granted Feb 17, 2009·11 cites·5 claims
- 1089US6354922B1Polishing apparatusEBARA CORP·Filed 2000·Granted Mar 12, 2002·50 cites·29 claims
- 1186US8657648B2Processing apparatus having four processing unitsYAMANAKA SATOSHI·Filed 2011·Granted Feb 25, 2014·9 cites·3 claims
- 1283US6682408B2Polishing apparatusEBARA CORP·Filed 2001·Granted Jan 27, 2004·21 cites·24 claims
- 1382US7850509B2Substrate holding apparatusEBARA CORP·Filed 2008·Granted Dec 14, 2010·5 cites·5 claims
- 1481US6354918B1Apparatus and method for polishing workpieceEBARA CORP·Filed 1999·Granted Mar 12, 2002·53 cites·9 claims
- 1576US6899604B2Dressing apparatus and polishing apparatusEBARA CORP·Filed 2002·Granted May 31, 2005·17 cites·14 claims
- 1675US6447385B1Polishing apparatusEBARA CORP·Filed 2000·Granted Sep 10, 2002·17 cites·11 claims
- 1775US6319105B1Polishing apparatusEBARA CORP·Filed 1999·Granted Nov 20, 2001·44 cites·26 claims
- 1873US2025387870A1Processing apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 1972US2024399526A1Polishing head and polishing systemEBARA CORP·Filed 2024·Application pending·0 cites
- 2070US12318881B2Substrate polishing apparatus and substrate polishing methodEBARA CORP·Filed 2022·Granted Jun 3, 2025·0 cites·14 claims
- 2168US6241578B1Carrier device in polishing apparatus and method for controlling carrier deviceEBARA CORP·Filed 1999·Granted Jun 5, 2001·28 cites·13 claims
- 2267US6312312B1Polishing apparatusEBARA CORP·Filed 1998·Granted Nov 6, 2001·27 cites·16 claims
- 2365US6413154B1Polishing apparatusEBARA CORP·Filed 1999·Granted Jul 2, 2002·25 cites·19 claims
- 2464US7638030B2Electrolytic processing apparatus and electrolytic processing methodEBARA CORP·Filed 2003·Granted Dec 29, 2009·3 cites·24 claims
- 2564US2025205846A1Polishing apparatus and polishing methodEBARA CORP·Filed 2024·Application pending·0 cites
- 2663US6602119B1Dressing apparatusEBARA CORP·Filed 2000·Granted Aug 5, 2003·9 cites·24 claims
- 2761US12017323B2Polishing head system and polishing apparatusEBARA CORP·Filed 2021·Granted Jun 25, 2024·0 cites·29 claims
- 2860US7156725B2Substrate polishing machineEBARA CORP·Filed 2002·Granted Jan 2, 2007·7 cites·5 claims
- 2960US6379229B1Polishing apparatusEBARA CORP·Filed 2000·Granted Apr 30, 2002·7 cites·21 claims
- 3057US2025332681A1Polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
- 3156US6042455APolishing apparatusEBARA CORP·Filed 1998·Granted Mar 28, 2000·20 cites·19 claims
- 3250US6558226B1Polishing apparatusEBARA CORP·Filed 2000·Granted May 6, 2003·4 cites·11 claims
- 3349US12211733B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2021·Granted Jan 28, 2025·0 cites·14 claims
- 3447US2024075579A1Surface property measuring apparatus for polishing pad, surface property measuring method for polishing pad, and surface property judging method for polishing padEBARA CORP·Filed 2022·Application pending·0 cites
- 3545US11633828B2Substrate polishing system, substrate polishing method and substrate polishing apparatusEBARA CORP·Filed 2020·Granted Apr 25, 2023·0 cites·8 claims
- 3639US2018236630A1Substrate polisher and polishing methodEBARA CORP·Filed 2018·Application pending·0 cites
- 3739US2004198052A1Apparatus for manufacturing semiconductor deviceFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →