Inventor · disambiguated record
Norman L. Tam
Also filed as: TAM NORMAN · TAM NORMAN L
33 granted patents·6 pending applications·177 citations·filing 2002–2023
97Inventor score
Files withAPPLIED MATERIALS INC33TSENG MING-KUEI MICHAEL2APPLIED MATERIAS INC1KOELMEL BLAKE R1MANI RAJESH1
Top patents by PatentIndex Score
39 records- 0196US11348769B2Plasma-enhanced anneal chamber for wafer outgassingAPPLIED MATERIALS INC·Filed 2020·Granted May 31, 2022·5 cites·12 claims
- 0293US9330955B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2014·Granted May 3, 2016·10 cites·20 claims
- 0392US9659809B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted May 23, 2017·6 cites·20 claims
- 0492US7509035B2Lamp array for thermal processing exhibiting improved radial uniformityAPPLIED MATERIALS INC·Filed 2005·Granted Mar 24, 2009·37 cites·9 claims
- 0590US8056500B2Thermal reactor with improved gas flow distributionTSENG MING-KUEI MICHAEL·Filed 2008·Granted Nov 15, 2011·17 cites·20 claims
- 0690US7947561B2Methods for oxidation of a semiconductor deviceAPPLIED MATERIALS INC·Filed 2009·Granted May 24, 2011·14 cites·18 claims
- 0789US8608853B2Thermal reactor with improved gas flow distributionTSENG MING-KUEI MICHAEL·Filed 2011·Granted Dec 17, 2013·10 cites·15 claims
- 0888US11901195B2Methods, systems, and apparatus for conducting a radical treatment operation prior to conducting an annealing operationAPPLIED MATERIALS INC·Filed 2022·Granted Feb 13, 2024·2 cites·14 claims
- 0988US10770272B2Plasma-enhanced anneal chamber for wafer outgassingAPPLIED MATERIALS INC·Filed 2017·Granted Sep 8, 2020·5 cites·12 claims
- 1087US8888916B2Thermal reactor with improved gas flow distributionAPPLIED MATERIALS INC·Filed 2013·Granted Nov 18, 2014·6 cites·20 claims
- 1187US8548311B2Apparatus and method for improved control of heating and cooling of substratesKOELMEL BLAKE R·Filed 2009·Granted Oct 1, 2013·11 cites·11 claims
- 1285US10373859B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2018·Granted Aug 6, 2019·2 cites·20 claims
- 1385US10056286B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2017·Granted Aug 21, 2018·2 cites·20 claims
- 1485US8207044B2Methods for oxidation of a semiconductor deviceMANI RAJESH·Filed 2011·Granted Jun 26, 2012·8 cites·18 claims
- 1584US10109514B2Visual feedback for process control in RTP chambersAPPLIED MATERIALS INC·Filed 2017·Granted Oct 23, 2018·3 cites·22 claims
- 1684US8546271B2Method of improving oxide growth rate of selective oxidation processesYOKOTA YOSHITAKA·Filed 2011·Granted Oct 1, 2013·5 cites·20 claims
- 1784US7951728B2Method of improving oxide growth rate of selective oxidation processesAPPLIED MATERIALS INC·Filed 2007·Granted May 31, 2011·7 cites·23 claims
- 1883US9842759B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2016·Granted Dec 12, 2017·2 cites·18 claims
- 1982US10128144B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted Nov 13, 2018·2 cites·20 claims
- 2082US9552989B2Apparatus and method for improved control of heating and cooling of substratesAPPLIED MATERIALS INC·Filed 2013·Granted Jan 24, 2017·4 cites·20 claims
- 2181US12347679B2System and method for radical and thermal processing of substratesAPPLIED MATERIALS INC·Filed 2023·Granted Jul 1, 2025·0 cites·20 claims
- 2280US9117661B2Method of improving oxide growth rate of selective oxidation processesAPPLIED MATERIALS INC·Filed 2013·Granted Aug 25, 2015·3 cites·13 claims
- 2378US9735034B2Visual feedback for process control in RTP chambersAPPLIED MATERIALS INC·Filed 2014·Granted Aug 15, 2017·3 cites·17 claims
- 2477US10571337B2Thermal cooling member with low temperature controlAPPLIED MATERIALS INC·Filed 2017·Granted Feb 25, 2020·2 cites·12 claims
- 2570US11823901B2System and method for radical and thermal processing of substratesAPPLIED MATERIALS INC·Filed 2021·Granted Nov 21, 2023·0 cites·20 claims
- 2669US11587789B2System and method for radical and thermal processing of substratesAPPLIED MATERIALS INC·Filed 2020·Granted Feb 21, 2023·0 cites·18 claims
- 2768US9385004B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2014·Granted Jul 5, 2016·1 cites·3 claims
- 2863US10948353B2Thermal processing chamber with low temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted Mar 16, 2021·0 cites·20 claims
- 2963US6828234B2RTP process chamber pressure controlAPPLIED MATERIALS INC·Filed 2002·Granted Dec 7, 2004·10 cites·18 claims
- 3055US12327763B2Treatment methods for titanium nitride filmsAPPLIED MATERIALS INC·Filed 2021·Granted Jun 10, 2025·0 cites·19 claims
- 3153US2025062123A1Treatments for thin films used in photolithographyAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3252US11859277B2Catalyst enhanced molybdenum deposition and gap fillAPPLIED MATERIALS INC·Filed 2021·Granted Jan 2, 2024·0 cites·7 claims
- 3350US2022298620A1Enhanced oxidation with hydrogen radical pretreatmentAPPLIED MATERIAS INC·Filed 2022·Application pending·0 cites
- 3450US2022251708A1Apparatus, methods, and systems of using hydrogen radicals for thermal annealingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3549US9514969B2Apparatus for reducing the effect of contamination on a rapid thermal processAPPLIED MATERIALS INC·Filed 2014·Granted Dec 6, 2016·0 cites·11 claims
- 3649US2024290585A1Higher pressure purge for impurity reduction in radical treatment chamberAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3746US11978646B2Thermal chamber with improved thermal uniformityAPPLIED MATERIALS INC·Filed 2018·Granted May 7, 2024·0 cites·18 claims
- 3844US2015131698A1Low temperature rtp control using ir cameraAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3934US2016358789A1Apparatus for decreasing substrate temperature non-uniformityAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →