Inventor · disambiguated record
Nobutoshi Terasawa
Also filed as: TERASAWA NOBUTOSHI
6 granted patents·6 pending applications·6 citations·filing 2008–2025
71Inventor score
Top patents by PatentIndex Score
12 records- 0164US8945413B2Etching method, etching apparatus, and ring memberSUZUKI AYUTA·Filed 2012·Granted Feb 3, 2015·2 cites·14 claims
- 0262US8121799B2Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wireTERASAWA NOBUTOSHI·Filed 2008·Granted Feb 21, 2012·4 cites·10 claims
- 0358US2025231553A1Information processing apparatus, semiconductor manufacturing apparatus, and information processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0456US12438055B2Abnormality detection method and processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Oct 7, 2025·0 cites·9 claims
- 0555US2024012373A1Information processing apparatus, storage medium, and control methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0652US2012169505A1Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wireTERASAWA NOBUTOSHI·Filed 2012·Application pending·0 cites
- 0749US2025238025A1Information processing apparatus, information processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0846US2024020895A1Chart generation method and information processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0944US9441292B2Etching method, etching apparatus, and ring memberTOKYO ELECTRON LTD·Filed 2015·Granted Sep 13, 2016·0 cites·1 claims
- 1043US11567485B2Substrate processing system and method for monitoring process dataTOKYO ELECTRON LTD·Filed 2020·Granted Jan 31, 2023·0 cites·9 claims
- 1141US2013148817A1Abnormality detection apparatus for periodic driving system, processing apparatus including periodic driving system, abnormality detection method for periodic driving system, and computer programTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
- 1237US12411479B2Method and apparatus for determining cause of abnormality in a semiconductor manufacturing chamberTOKYO ELECTRON LTD·Filed 2021·Granted Sep 9, 2025·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →