Inventor · disambiguated record
Norio Uchihira
Also filed as: UCHIHIRA NORIO
4 granted patents·165 citations·filing 1997–1999
81Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0180US5945161AApparatus and method for supplying process solution to surface of substrate to be processedTOKYO ELECTRON LTD·Filed 1997·Granted Aug 31, 1999·60 cites·21 claims
- 0274US6062240ATreatment deviceTOKYO ELECTRON LTD·Filed 1998·Granted May 16, 2000·45 cites·29 claims
- 0372US6261378B1Substrate cleaning unit and cleaning methodTOKYO ELECTRON LTD·Filed 1999·Granted Jul 17, 2001·43 cites·25 claims
- 0451US6058544AScrubbing apparatus and scrubbing methodTOKYO ELECTRON LTD·Filed 1998·Granted May 9, 2000·17 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →