Inventor · disambiguated record
Nuoya Yang
Also filed as: YANG NUOYA
1 granted patent·4 pending applications·0 citations·filing 2020–2024
13Inventor score
Technology areasH10P
Files withLAM RES CORP5
Top patents by PatentIndex Score
5 records- 0170US2024392443A1Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processesLAM RES CORP·Filed 2024·Application pending·0 cites
- 0255US2022228263A1Independently adjustable flowpath conductance in multi-station semiconductor processingLAM RES CORP·Filed 2020·Application pending·0 cites
- 0354US12071689B2Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processesLAM RES CORP·Filed 2020·Granted Aug 27, 2024·0 cites·22 claims
- 0453US2025372367A1Deposition and etch of silicon-containing layerLAM RES CORP·Filed 2023·Application pending·0 cites
- 0549US2024355624A1In-situ core protection in multi-patterningLAM RES CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →