Inventor · disambiguated record
Oktay Yildirim
Also filed as: YILDIRIM OKTAY
5 granted patents·1 pending application·7 citations·filing 2011–2023
69Inventor score
Top patents by PatentIndex Score
6 records- 0185US10416555B2Lithographic patterning process and resists to use thereinASML NETHERLANDS BV·Filed 2015·Granted Sep 17, 2019·3 cites·27 claims
- 0279US9235125B2Methods of providing patterned chemical epitaxy templates for self-assemblable block copolymers for use in device lithographyASML NETHERLANDS BV·Filed 2013·Granted Jan 12, 2016·4 cites·20 claims
- 0377US12189308B2Method for adjusting a target feature in a model of a patterning process based on local electric fieldsASML NETHERLANDS BV·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 0462US11619884B2Method for adjusting a target feature in a model of a patterning process based on local electric fieldsASML NETHERLANDS BV·Filed 2019·Granted Apr 4, 2023·0 cites·20 claims
- 0562US11415886B2Lithographic patterning process and resists to use thereinASML NETHERLANDS BV·Filed 2019·Granted Aug 16, 2022·0 cites·9 claims
- 0640US2012182538A1Methods and Apparatus for Inspection Of Articles, EUV Lithography Reticles, Lithography Apparatus and Method of Manufacturing DevicesKOOLE ROELOF·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →