Inventor · disambiguated record
Oleksiy Galaktionov
Also filed as: GALAKTIONOV OLEKSIY · GALAKTIONOV OLEKSIY SERGIYOVICH
3 granted patents·1 pending application·10 citations·filing 2012–2023
60Inventor score
Top patents by PatentIndex Score
4 records- 0191US8730448B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted May 20, 2014·9 cites·19 claims
- 0267US8797504B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted Aug 5, 2014·1 cites·19 claims
- 0357US2025199421A1Substrate warpage determination systemASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0456US12235592B2Object holder, electrostatic sheet and method for making an electrostatic sheetASML NETHERLANDS BV·Filed 2021·Granted Feb 25, 2025·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →