Inventor · disambiguated record
Oliver Jäckel
Also filed as: JACKEL OLIVER · JÄCKEL OLIVER
2 granted patents·1 pending application·0 citations·filing 2001–2021
23Inventor score
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
3 records- 0154US12105415B2Method, apparatus and computer program for analyzing and/or processing of a mask for lithographyZEISS CARL SMT GMBH·Filed 2021·Granted Oct 1, 2024·0 cites·28 claims
- 0228US2004013414A1Determining the position of an axis of rotation (patient positioning table, radiation therapy) on the basis of an angle of rotation and a chord through a movable markFiled 2001·Application pending·0 cites
- 0327US11079586B2Measuring microscope for measuring masks for lithographic methods and measuring method and calibration method thereforZEISS CARL SMT GMBH·Filed 2017·Granted Aug 3, 2021·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →