Inventor · disambiguated record
Oleksandr Mikhnenko
Also filed as: MIKHNENKO OLEKSANDR
3 granted patents·3 pending applications·0 citations·filing 2020–2024
44Inventor score
Files withLAM RES CORP6
Top patents by PatentIndex Score
6 records- 0170US2025069866A1In situ real-time sensing and compensation of non-uniformities in substrate processing systemsLAM RES CORP·Filed 2024·Application pending·0 cites
- 0257US12500069B2Method of mounting wires to substrate support ceramicLAM RES CORP·Filed 2021·Granted Dec 16, 2025·0 cites·22 claims
- 0355US12142464B2In situ real-time sensing and compensation of non-uniformities in substrate processing systemsLAM RES CORP·Filed 2020·Granted Nov 12, 2024·0 cites·17 claims
- 0446US12444570B2Electrostatic chuck heater resistance measurement to approximate temperatureLAM RES CORP·Filed 2020·Granted Oct 14, 2025·0 cites·27 claims
- 0534US2022130705A1Electrostatic chuck with powder coatingLAM RES CORP·Filed 2020·Application pending·0 cites
- 0633US2022181127A1Electrostatic chuck systemLAM RES CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →