Inventor · disambiguated record
Olaf Zimmerhackl
Also filed as: ZIMMERHACKL OLAF
2 granted patents·15 citations·filing 2008–2008
55Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0181US8047762B2Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process toolsGLOBALFOUNDRIES INC·Filed 2008·Granted Nov 1, 2011·13 cites·16 claims
- 0251US9218994B2Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the sameZIMMERHACKL OLAF·Filed 2008·Granted Dec 22, 2015·2 cites·28 claims
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