Inventor · disambiguated record
Pavel Adamec
Also filed as: ADAMEC PAVEL
43 granted patents·12 pending applications·979 citations·filing 1999–2023
98Inventor score
Files withINTEGRATED CIRCUIT TESTING27ADAMEC PAVEL10APPLIED MATERIALS ISRAEL LTD5ICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH5APPLIED MATERIALS INC3
Top patents by PatentIndex Score
55 records- 0198US7274018B2Charged particle beam apparatus and method for operating the sameINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 25, 2007·162 cites·10 claims
- 0298US7045781B2Charged particle beam apparatus and method for operating the sameINTEGRATED CIRCUIT TESTING·Filed 2004·Granted May 16, 2006·214 cites·19 claims
- 0397US6943349B2Multi beam charged particle deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Sep 13, 2005·126 cites·28 claims
- 0496US9153413B2Multi-beam scanning electron beam device and methods of using the sameALMOGY GILAD·Filed 2008·Granted Oct 6, 2015·57 cites·24 claims
- 0594US9847208B1Electron beam device, cold field emitter, and method for regeneration of a cold field emitterICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted Dec 19, 2017·11 cites·15 claims
- 0694US6614026B1Charged particle beam columnAPPLIED MATERIALS INC·Filed 1999·Granted Sep 2, 2003·88 cites·15 claims
- 0792US7253417B2Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lensINTEGRATED CIRCUIT TESTING·Filed 2003·Granted Aug 7, 2007·39 cites·28 claims
- 0887US9633815B1Emitter for an electron beam, electron beam device and method for producing and operating an electron emitterICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2016·Granted Apr 25, 2017·11 cites·20 claims
- 0987US7067807B2Charged particle beam column and method of its operationAPPLIED MATERIALS ISRAEL LTD·Filed 2004·Granted Jun 27, 2006·28 cites·33 claims
- 1086US7595490B2Charged particle beam emitting device and method for operating a charged particle beam emitting deviceINTEGRATED CIRCUIT TESTING·Filed 2006·Granted Sep 29, 2009·10 cites·36 claims
- 1186US6452175B1Column for charged particle beam deviceAPPLIED MATERIALS INC·Filed 1999·Granted Sep 17, 2002·49 cites·30 claims
- 1284US8674300B2Feedback loop for emitter flashingADAMEC PAVEL·Filed 2010·Granted Mar 18, 2014·6 cites·20 claims
- 1384US6943507B2Device and method for controlling focussed electron beamsINTEGRATED CIRCUIT TESTING·Filed 2002·Granted Sep 13, 2005·19 cites·36 claims
- 1483US7932495B2Fast wafer inspection systemINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Apr 26, 2011·6 cites·22 claims
- 1582US8618500B2Multi channel detector, optics therefor and method of operating thereofADAMEC PAVEL·Filed 2012·Granted Dec 31, 2013·5 cites·20 claims
- 1682US8530837B2Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimenADAMEC PAVEL·Filed 2011·Granted Sep 10, 2013·5 cites·15 claims
- 1781US8957390B2Electron gun arrangementINTEGRATED CIRCUIT TESTING·Filed 2014·Granted Feb 17, 2015·4 cites·20 claims
- 1881US7034297B2Method and system for use in the monitoring of samples with a charged particle beamAPPLIED MATERIALS ISRAEL LTD·Filed 2003·Granted Apr 25, 2006·22 cites·32 claims
- 1980US7928403B2Multiple lens assembly and charged particle beam device comprising the sameINTEGRATED CIRCUIT TESTING·Filed 2005·Granted Apr 19, 2011·5 cites·29 claims
- 2080US7075075B2Charged particle deflecting systemINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Jul 11, 2006·16 cites·43 claims
- 2179US10504684B1High performance inspection scanning electron microscope device and method of operating the sameICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2018·Granted Dec 10, 2019·2 cites·20 claims
- 2279US6825476B2Column for a charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Nov 30, 2004·14 cites·24 claims
- 2378US7982179B2Beam current calibration systemINTEGRATED CIRCUIT TESTING·Filed 2009·Granted Jul 19, 2011·4 cites·23 claims
- 2478US6747279B2Objective lens for a charged particle beam deviceINTEGRATED CIRCUIT TESTING·Filed 2001·Granted Jun 8, 2004·13 cites·26 claims
- 2576US8044368B2Lens coil cooling of a magnetic lensINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Oct 25, 2011·3 cites·19 claims
- 2676US7659514B2Asymmetric annular detectorINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Feb 9, 2010·3 cites·16 claims
- 2776US6825475B2Deflection method and system for use in a charged particle beam columnAPPLIED MATERIALS ISRAEL LTD·Filed 2002·Granted Nov 30, 2004·13 cites·31 claims
- 2874US7928405B2Magnetic lens assemblyINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Apr 19, 2011·4 cites·20 claims
- 2972US7919749B2Energy filter for cold field emission electron beam apparatusINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Apr 5, 2011·2 cites·25 claims
- 3071US8164067B2Arrangement and method for the contrast improvement in a charged particle beam device for inspecting a specimenADAMEC PAVEL·Filed 2010·Granted Apr 24, 2012·3 cites·22 claims
- 3170US8101911B2Method and device for improved alignment of a high brightness charged particle gunADAMEC PAVEL·Filed 2008·Granted Jan 24, 2012·2 cites·24 claims
- 3268US7638777B2Imaging system with multi source arrayINTEGRATED CIRCUIT TESTING·Filed 2004·Granted Dec 29, 2009·8 cites·22 claims
- 3367US8008629B2Charged particle beam device and method for inspecting specimenINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Aug 30, 2011·3 cites·3 claims
- 3466US7842930B2Charged particle detector assembly, charged particle beam apparatus and method for generating an imageINTEGRATED CIRCUIT TESTING·Filed 2007·Granted Nov 30, 2010·1 cites·22 claims
- 3565US8987692B2High brightness electron gun, system using the same, and method of operating thereofINTEGRATED CIRCUIT TESTING·Filed 2014·Granted Mar 24, 2015·1 cites·20 claims
- 3662US7800062B2Method and system for the examination of specimenAPPLIED MATERIALS INC·Filed 2004·Granted Sep 21, 2010·6 cites·17 claims
- 3762US7282711B2Multiple electron beam deviceINTEGRATED CIRCUIT TESTING·Filed 2002·Granted Oct 16, 2007·6 cites·35 claims
- 3862US2025132121A1Method of operating a charged particle beam apparatus, and charged particle beam apparatusICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
- 3961US11469072B2Charged particle beam apparatus, scanning electron microscope, and method of operating a charged particle beam apparatusICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Granted Oct 11, 2022·0 cites·20 claims
- 4061US7268361B2Electron emission deviceINTEGRATED CIRCUIT TESTING·Filed 2002·Granted Sep 11, 2007·4 cites·30 claims
- 4159US2025166958A1Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflectorICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2023·Application pending·0 cites
- 4254US7872239B2Electrostatic lens assemblyINTEGRATED CIRCUIT TESTING·Filed 2008·Granted Jan 18, 2011·0 cites·25 claims
- 4354US7847267B2Scanning electron microscope having multiple detectors and a method for multiple detector based imagingAPPLIED MATERIALS ISRAEL LTD·Filed 2003·Granted Dec 7, 2010·4 cites·16 claims
- 4454US2023197399A1Electron microscope, electron source for electron microscope, and methods of operating an electron microscopeICT INTEGRATED CIRCUIT TESTING GES FUER HALBLEITERPRUEFTECHNIK MBH·Filed 2021·Application pending·0 cites
- 4552US2008284332A1Gun chamber, charged particle beam apparatus and method of operating sameINTEGRATED CIRCUIT TESTING·Filed 2008·Application pending·0 cites
- 4651US2008283745A1Emitter chamber, charged partical apparatus and method for operating sameINTEGRATED CIRCUIT TESTING·Filed 2008·Application pending·0 cites
- 4751US2011163229A1High throughput sem toolAPPLIED MATERIALS ISRAEL LTD·Filed 2008·Application pending·0 cites
- 4848US2007145303A1Protecting Aperture for Charged Particle EmitterADAMEC PAVEL·Filed 2006·Application pending·0 cites
- 4947US9673017B1Housing device for magnetic shielding, housing arrangement for magnetic shielding, charged particle beam device, and method of manufacturing a housing deviceICT INTEGRATED CIRCUIT TESTING GES FÜR HALBLEITERPRÜFTECHNIK MBH·Filed 2015·Granted Jun 6, 2017·0 cites·20 claims
- 5047US2007018562A1Field emitter arrangement and method of cleansing an emitting surface of a field emitterINTEGRATED CIRCUIT TESTING·Filed 2006·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →