Inventor · disambiguated record
Pavlo Antonov
Also filed as: ANTONOV PAVLO
2 granted patents·2 pending applications·4 citations·filing 2017–2023
43Inventor score
Technology areasH10P
Files withASML NETHERLANDS BV4
Top patents by PatentIndex Score
4 records- 0180US10719019B2Substrate holder and a method of manufacturing a substrate holderASML NETHERLANDS BV·Filed 2017·Granted Jul 21, 2020·4 cites·20 claims
- 0263US2024011150A1Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of materialASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0348US11807937B2Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of materialASML NETHERLANDS BV·Filed 2019·Granted Nov 7, 2023·0 cites·6 claims
- 0438US2021053177A1System, device and method for reconditioning a substrate supportASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →