Inventor · disambiguated record
Paul Petrus Joannes Berkvens
Also filed as: BERKVENS PAUL PETRUS JOANNES
13 granted patents·150 citations·filing 2007–2017
90Inventor score
Files withASML NETHERLANDS BV4PHILIPS DANNY MARIA HUBERTUS2BERKVENS PAUL PETRUS JOANNES1DE METSENAERE CHRISTOPHE1DIRECKS DANIEL JOZEF MARIA1
Top patents by PatentIndex Score
13 records- 0198US7710540B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted May 4, 2010·94 cites·24 claims
- 0291US8587762B2Methods relating to immersion lithography and an immersion lithographic apparatusSTREEFKERK BOB·Filed 2008·Granted Nov 19, 2013·15 cites·29 claims
- 0390US8634053B2Lithographic apparatus and device manufacturing methodRIEPEN MICHEL·Filed 2007·Granted Jan 21, 2014·12 cites·27 claims
- 0487US8421993B2Fluid handling structure, lithographic apparatus and device manufacturing methodDIRECKS DANIEL JOZEF MARIA·Filed 2009·Granted Apr 16, 2013·14 cites·20 claims
- 0577US9213246B2Fluid extraction system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Dec 15, 2015·2 cites·20 claims
- 0676US8472003B2Fluid handling structure, lithographic apparatus and device manufacturing methodPATEL HRISHIKESH·Filed 2010·Granted Jun 25, 2013·5 cites·24 claims
- 0774US8654309B2Fluid extraction system, lithographic apparatus and device manufacturing methodKEMPER NICOLAAS RUDOLF·Filed 2009·Granted Feb 18, 2014·3 cites·20 claims
- 0865US8786830B2Immersion lithographic apparatus including a pressure sensor to measure pressure of the immersion liquid and a device manufacturing methodDE METSENAERE CHRISTOPHE·Filed 2010·Granted Jul 22, 2014·2 cites·21 claims
- 0962US8638417B2Fluid handling structure, lithographic apparatus and a device manufacturing methodPHILIPS DANNY MARIA HUBERTUS·Filed 2011·Granted Jan 28, 2014·1 cites·25 claims
- 1061US8405815B2Fluid handling structure, lithographic apparatus and device manufacturing methodPHILIPS DANNY MARIA HUBERTUS·Filed 2010·Granted Mar 26, 2013·1 cites·20 claims
- 1160US10268127B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 23, 2019·0 cites·20 claims
- 1259US9645506B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted May 9, 2017·0 cites·20 claims
- 1355US8681308B2Lithographic apparatus and device manufacturing methodBERKVENS PAUL PETRUS JOANNES·Filed 2007·Granted Mar 25, 2014·1 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →