Inventor · disambiguated record
Patrick Philipp Helfenstein
Also filed as: HELFENSTEIN PATRICK PHILIPP
1 granted patent·5 pending applications·1 citations·filing 2020–2023
16Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0175US12493247B2Method and system for predicting process information with a parameterized modelASML NETHERLANDS BV·Filed 2020·Granted Dec 9, 2025·1 cites·13 claims
- 0254US2025306475A1Method for parameter reconstruction of a metrology device and associated metrology deviceASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0353US2024320528A1Metrology target optimizationASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0451US2024152060A1Method and system for predicting process information with a parameterized modelASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0550US2024255279A1Metrology measurement method and apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0649US2025021020A1Obtaining a parameter characterizing a fabrication processASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →